SUSS CIC1200, User Manual

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MAINTENANCE AND SERVICE
OP CIC1200 E Rev4.0 06-09 Chapter 5
29
5
5. M
AINTENANCE AND
S
ERVICE
5.1. Maintenance
The CIC units themselves do not require mainte-
nance.But the following safety related activities are
required:
• Perform regular safety checks of the lamp house
door interlock, as described in the manuals of the
respective mask aligner. Preferably do this safety
check at every lamp exchange.
• With every lamp exchange, check the condition
of the current connections in the lamp house and
replace any darkened or oxidized component.
Check also that the lamp wire is sufficiently dis-
tant to the housing (including closed door) that
the high voltage ignition pulse can not spark over.
• Check also during lamp exchange, that all lamp
cooling equipment is working properly:
• lamp house exhaust flow,
• cooling nozzle, supply tube and supply pres-
sure.
• Reset the lamp life counter (section 4.4.1) when
replacing the lamp by a new lamp.
• If lamp type is changed, change also the selec-
tion at the CIC lamp menu (section 4.4).
Attention!
Always regard, that another lamp type
may require additional adaptation parts
to fit to the lamp house geometry and
the cooling requirements. If lamp type
is to be changed for the first time, con-
tact SUSS MicroTec for qualified assis-
tance!
• Dispose off used lamps - pressurized and con-
taining mercury - according to applicable local
and company rules.
• After the warm-up period of the new lamp, check
for correct cooling conditions (exhaust tempera-
ture and lamp socket temperature). For details
see section "Lamp cooling" in the
Installation
Manual of the respective mask aligner.
• When optics or the lamp type has been changed,
a re-adjustment of the UV-measuring input could
be required; see section 4.7 for adjustment pro-
cedure.
5.2. Error Messages
Potentially critical error messages are accompanied
by a beeper sound.
Those messages for critical errors are not self-reset-
ting when the error condition disappears, but they
can be manually reset by pressing
SET LAMP IDLE RESET
If error message reappears after a manual error re-
set, the error condition is still present.
In this case the lamp must be switched off immedi-
ately (press OFF) and the reason for the error must
be investigated. otherwise heavy equipment dam-
age could result, caused by a lamp burn down or
lamp explosion.
If no error cause can be found, try with a new lamp.
Also, if the same error message will be created
again by the CIC after a while, the lamp must be
switched off and exchanged for a new lamp.
When investigating the error cause for VOLT ERR or
CURR ERR, check carefully:
• the lamp itself for any visible damage on the
metal sockets, the glass tube and the internal
electrodes,
• all connection contacts to the lamp for clean
condition.
Replace any worn part!
If the error remains after replacements, call
SUSS service.
Always regard the specific safety warnings for lamp
replacement.
Warning!
Do not continue to run a lamp, which
repeatedly causes error messages on
the CIC.