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2. Product Specific Precautions 2

 

 

Common Precautions 2   

Be sure to read before handling

 

Maintenance Parts 

   

 

SMC specified parts should be used for service. 
Refer to Chapter 5, “Construction and Dimensions" (P. 9) for the part indication numbers. 
1.Replace the handle assembly when changing the sealant material. Due to the different materials 
used, changing only the seal may prove inadequate. 

 

Handle assembly/construction part number (1)

 

Temperature 

specifications 

Valve size 

16 

25 

40 

50 

Standard(5

150 

o

C

 

XLH16-30-1 

XLH25-30-1 

XLH40-30-1 

XLH50-30-1 

 

Note1) List the optional seal material symbol after the model number, except for the standard 

seal material (FKM: compound No. 1349-80).

    e.g.) XLH16-30-1-XN1

 

 

Exterior seal, valve seal   

Description 

Constructions No. 

Material 

Valve size 

16 

25 

40 

50 

Exterior seal (3) 

Standard   

AS568-025V 

AS568-030V 

AS568-035V 

AS568-039V 

Specific 

AS568-025 

** 

AS568-030 

** 

AS568-035 

** 

AS568-039 

** 

Valve seal (2) 

Standard 

B2401-V15V 

B2401-V24V 

B2401-P42V 

AS568-227V 

Specific 

B2401-V15 

** 

B2401-V24 

** 

B2401-P42 

** 

AS568-227 

** 

Note1) List the optional seal material symbol after the model number, except for the 

standard sealant material (FKM: compound no. 1349-80).

    e.g.) AS568-025-XN1

 

Note2) Refer to the Construction of each series for the construction numbers. 
Note3) Due to the different materials used, changing only the seal may prove inadequate.

 

 

Additional symbols of the seal materials 

 

Seal  material 

EPDM 

Barrel 

Perfluoro

R

 

Kalrez

R

 

Chemraz

R

 

VMQ 

FKM for 

PLASMA 

ULTIC 

ARMOR

R

 

Combination  No. 

2101-80 

70W 

4079 

SS592 

SS630 

SSE38 

1232-70 

3310-75 

UA4640 

Symbol

 

-XN1 

-XP1 

-XQ1 

-XR1 

-XR2 

-XR3 

-XS1 

-XT1 

-XU1 

Note1)

 Due to the different materials used, changing only the seal may prove inadequate. 

Barrel Perfluoro

R

  is a registered trademark of Matsumura Oil Co.,Ltd.   

Kalrez

R

  is a registered trademark of E.I. du Pont de Nemours and Company or   

its affiliates. 
Chemraz

R

  is a registered trademark of Greene, Tweed Technologies,Inc. 

ULTIC ARMOR

R

  is a registered trademark of Nippon Valqia Industries, Ltd.

 

 

Caution

 

6 -

 

 

XL*****-OMJ0005-C 

Summary of Contents for XLH16

Page 1: ...Doc no XL OMJ0005 C PRODUCT NAME High Vacuum L Type Valve MODEL Series Product Number XLH Series...

Page 2: ...1 4 Precautions on Design Selection Mounting Piping Wiring Maintenance 2 Product Specific Precautions 2 6 Maintenance parts 3 Specifications 7 4 Construction and Outer dimensions 9 5 Period and scope...

Page 3: ...when configuring the equipment 2 Only personnel with appropriate training should operate machinery and equipment The product specified here may become unsafe if handled incorrectly The assembly opera...

Page 4: ...a replacement product or necessary parts will be provided This limited warranty applies only to our product independently and not to any other damage incurred due to the failure of the product 3 Prior...

Page 5: ...of up to 30m s2 45 to 250Hz Be advised that continuous vibration may cause a decline in durability Arrange piping to avoid excessive vibration or impacts High temperature type temperature specificati...

Page 6: ...take care not to damage any part of it 2 Replace the handle assembly when the valve is approaching the end of its service life For the endurance cycles refer to Chapter 5 Period and Scope of Warranty...

Page 7: ...9 Valve seal 2 Standard B2401 V15V B2401 V24V B2401 P42V AS568 227V Specific B2401 V15 B2401 V24 B2401 P42 AS568 227 Note1 List the optional seal material symbol after the model number except for the...

Page 8: ...ing temperature for the valve is 150o C If the heater temperature is over 200o C or valve temperature is over 150o C please use thermostat to control the Model XLH 16 XLH 25 XLH 40 XLH 50 Flange valve...

Page 9: ...ater assemblies are used the inrush current to the heaters will be magnified and care should be taken When multiple heater assemblies or valves are used do not apply power to the heater assemblies sim...

Page 10: ...erial SUS304 Body Material A6063 Heater option Handle Ass y Maintenance part Including Exterior seal Maintenance part Valve seal Maintenance part A A B G H C C D E E F Model H XLH 16 40 100 5 38 1 30...

Page 11: ...damage incurred due to the failure of the valve Result of endurance test Using the circuit shown on the right The valve was opened and closed in an internal vacuum state at nominal room temperature an...

Page 12: ...mask Pay attention to the handling of components according to the procedure in the next item onwards Do not apply excessive force or impact This will not only damage the product but also decrease its...

Page 13: ...ove the O ring from the groove for discharging gas using a plastic tool to prevent scratch the O ring groove Take care not to scratch the O ring groove Step 3 Remove the outer seal O ring from the Bod...

Page 14: ...y dust on the valve seal O ring surface Place the O ring on the O ring groove Press the O ring into the groove in numerical order press diagonally to fit the O ring into the groove Take care not to tw...

Page 15: ...tighten manually until the O ring is compressed then perform extra tightening in diagonal order For models with heater tighten Bolt a to mount the Heater to the Body Insert the Cover O ring Bellows ho...

Page 16: ...81 3 5207 8249 Fax 81 3 5298 5362 URL http www smcworld com Note Specifications are subject to change without prior notice and any obligation on the part of the manufacturer 2011 SMC Corporation All R...

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