8
3-1 Operation
Figures 1
and
2B
shows the valve in the
CLOSED
position
•
As air pressure is applied to the ports, the gate will move towards the desired position.
(OPEN / CLOSE)
•
Figure 2A
shows the valve in the
OPEN
position that would permit the transfer of product within the vacuum
environment.
•
Figure 2B
shows the valve moving upward prior to sealing the gate seal.
•
Figure 2C
shows the valve in the
CLOSED
position that would permit processing the product by customer within
vacuum environment.
3-2 Construction
Figures 1
illustrates the basic components that define the Gate valve.
•
1. Gate
mounts to the shaft and moves up and down to seal the Gate valve
•
2. Bellows
maintains vacuum in the Gate valve assembly while allowing for vertical motion of the shaft.
•
3. O-ring gate
is critical seal that contains process gas while sustain specific leak rate for vacuum.
•
4. O-ring Body
is critical seal that joins the Gate valve assembly to the customer system reactor/chamber.
•
5. O-ring Bonnet
assembly is critical seal that joins two Gate valve components while maintaining vacuum.
•
6. Fixing bolts
are specially deigned bolts that mount the gate to the shaft .
3-3 Gate OPEN to CLOSE (Fig2A
⇒
Fig2C)
•
Pressurizing to “CLOSE" side port (exhausting “OPEN" side)
•
Verify specified Mpa is maintained with operating range
•
System design and peripheral components can impact precision Gate valve performance by altering target
operating pressures.
•
Fully completing OPEN / CLOSE cycles are imperative to prevent damaging the valve components such as the End
Lock mechanism.
•
Verify specified torques for proper assembly
•
Verify fittings and tubing for kinks, twisting, damage, and long runs that might impact performance
•
Handle precision Gate valve with care to prevent damage and scratches to prevent vacuum leaks
•
Do not remove gate valve from reactor/chamber when the valve is in the closed position.
3-4 Gate CLOSE to OPEN (Fig.2C
⇒
Fig.2A)
•
Pressurizing to "OPEN" port side (exhausting "CLOSE" side)
•
Verify specified Mpa is maintained with operating range
•
System design and peripheral components can impact precision Gate valve performance by altering target
operating pressures.
•
Fully completing OPEN / CLOSE cycles are imperative to prevent damaging the valve components such as the End
Lock mechanism.
•
Verify specified torques for proper assembly
•
Verify fittings and tubing for kinks, twisting, damage, and long runs that might impact performance
•
Handle precision Gate valve with care to prevent damage and scratches to prevent vacuum leaks
•
Do not remove gate valve from reactor/chamber when the valve is in the closed position.
3-5 End lock (in case with End Lock)
When the air pressure is suddenly lost during opening and closing of Gate valve, The End lock mechanism will engage
.
The valve maintains the location before the air is lost.
