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1.The product is provided for use in manufacturing industries.

The product herein described is basically provided for peaceful use in manufacturing industries.
If considering using the product in other industries, consult SMC beforehand and exchange specifications or 
a contract if necessary.  If anything is unclear, contact your nearest sales branch.

Safety Instructions

1

. The warranty period of the product is 1 year in service or 1.5 years after the product is delivered.

Also, may have specified durability, running distance or replacement parts. Please consult your nearest
sales product branch.

2. For any failure or damage reported within the warranty period which is clearly our responsibility, a

replacement product or necessary parts will be provided. This limited warranty applies only to our
product independently, and not to any other damage incurred due to the failure of the product.

3. Prior to using SMC products, please read and understand the warranty terms and disclaimers noted in

the specified catalog for the particular products.

1.The use of SMC products with production equipment for the manufacture of weapons of mass

destruction (WMD) or any other weapon is strictly prohibited.

2. The exports of SMC products or technology from one country to another are governed by the relevant 
security laws and regulation of the countries involved in the transaction. Prior to the shipment of a SMC 
product to another country, assure that all local rules governing that export are known and followed.

Caution

Limited warranty and Disclaimer/Compliance Requirements

The product used is subject to the following

“Limited

warranty and

Disclaimer”

and

Compliance

Requirements”

. Read and accept them before using the product.

Limited warranty and Disclaimer

Compliance Requirements

Safety Instructions

Be sure to read the

Handling precautions for SMC

Products”

(M-E03-3) and

“Operation Manual”

before use.

 

Summary of Contents for XGTP 312-50336-1CN

Page 1: ...his operation manual thoroughly to understand Also refer to the drawing product information for structure and specification of this product Confirm operating environment is within operating specificat...

Page 2: ...afety Instructions 3 pg 1 Specifications 5 pg 2 How to Order 6 pg 3 Construction Operation 7 pg 4 Precautions 9 pg 5 Spare Parts 11 pg 6 Maintenance 11 pg 7 Troubleshooting 12 pg Attachment Maintenanc...

Page 3: ...failure when configuring the equipment 2 Only personnel with appropriate training should operate machinery and equipment The product specified here may become unsafe if handled incorrectly The assembl...

Page 4: ...e incurred due to the failure of the product 3 Prior to using SMC products please read and understand the warranty terms and disclaimers noted in the specified catalog for the particular products 1 Th...

Page 5: ...Switch D A93 Operating temperature 20 60 Main material of vacuum part Seal material FKM Mechanical parts Bellows AM350 Gate A6063 Body A5052 Bonnet A6061 Gate Bolt SUS316 Others SUS304 Piping size Rc...

Page 6: ...sub connector CDE 9SF05 made by HIROSE ELECTRIC CO LTD is recommended for the connector female type XGTP 312 50336 1CN Applicable water size For 300mm wafer Valve type 1 Insert type Without body 2 Cas...

Page 7: ...7 Figure 2A Figure 2B Figure 2C 3 Construction Operation Bonnet Assembly Figure 1...

Page 8: ...em design and peripheral components can impact precision Gate valve performance by altering target operating pressures Fully completing OPEN CLOSE cycles are imperative to prevent damaging the valve c...

Page 9: ...o removal of Bonnet assembly during maintenance procedures If Bonnet assembly is removed at CLOSE condition then Body s threads and critical sealing surfaces could be damaged 4 4 End lock release When...

Page 10: ...Cover on the actuating part The cover shields internal components while the Gate valve is operating prevent injury 6 Remove the pneumatic tubing from valve operation and confirm cylinder has no pressu...

Page 11: ...P300 2 1S XGTP31 50336 Bellows Assembly XGTP300 20AS XGTP31 50336 O Ring Body opening side FKM XGT300 9 10S XGTP31 50336 AS568 273 O ring Gate FKM XGT300 9 9S XGTP31 50336 1 AS568 271 Kalrez 4079 XGT3...

Page 12: ...mage of Bellow assembly Replace Bellows assembly Deterioration of O ring by processing Replace with new O ring whose material compatible with process environment Scratches on the seal surface Polish o...

Page 13: ...ure for maintenance 1 Pneumatically open gate valve 2 Loosen bolts at bonnetassembly 8pcs 3 Remove bonnet assembly from body Step 2 Remove Gate 1 Remove gate bolts 2pcs 2 Carefully remove gate from sh...

Page 14: ...entation of washer and thrust washer during disassembly 3 Remove bellows assembly Remove bellows clamps 2pcs on Lever assembly The bellows should be handled carefully and cleaned with clean room grade...

Page 15: ...ws clips Attach Bellows clips to Bellows assembly by mounting bolts Bellows is located in Bonnet assembly by mounting bolts Ensure that Bellows assembly is secured at collar Tightening torque 3 0 0 3...

Page 16: ...ve with clean room grade alcohol and wipes ethanol grade 1 Alpha wiper equivalent Careful handling is critical to prevent scratches and dents to seal surface of O ring groove Note When removing O ring...

Page 17: ...ng groove 2 Tighten Bolts 8pcs Tightening torque 17 5 2 Nm Step 6 Install Gate 1 Mounting Gate to Shaft Confirm proper orientation of gate when installing on shaft Reference groove for Gate O ring 2 A...

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