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12 

 

7.  
Troubleshooting

Status

Possible Cause

Countermeasure

Gate Internal 
Leakage

Operating pressure is too low

Increase pressure to 0.45MPa or more

Foreign materials on Seal surface

Cleaning the Seal Surface

Scratches  on  the  seal  surface of Gate

Replace Gate

Scratches on the seal surface of Body

Replace Body

Deterioration of O-ring by process exposure

Replace with new O-ring whose material 

compatible with process environment

Twist of O-ring 

Re-install O-ring

Come off of O-ring

Re-install O-ring

Peeling off of O-ring

Replace O-ring

Concave/Convex of end of O-ring

Place the convex  part  into  the groove  to 
make O-ring height the same

Deterioration of Bonnet assembly

Replace Bonnet assembly

External Leakage

Damage of Bellow assembly

Replace Bellows assembly

Deterioration of O-ring by processing

Replace  with  new  O-ring  whose  material 
compatible with process environment 

Scratches on the seal surface

Polish of seal surface

Gate is not CLOSING

End lock operation lock

Please refer to 4-4

Deterioration of Bonnet assembly

Increase pressure to 0.45MPa or more

Deterioration of Bonnet assembly

Replace Bonnet assembly

Gate is not OPENING

End lock operation lock

Please refer to 4-4

Operating pressure is too low

Increase pressure to 0.45MPa or more

Deterioration of Bonnet assembly

Replace Bonnet assembly

Auto-switch not 
working

Displacement of Auto-switch

Adjust the location to detect range

Failure of Auto-switch

Replace Auto-switch

Operating pressure is too low

Increase pressure to 0.45MPa or more

Bonnet assembly air 
leakage

Loosening of connections

Replace Bonnet assembly

Wear on piston seal

Replace Bonnet assembly

Summary of Contents for XGTP 312-50336-1CN

Page 1: ...his operation manual thoroughly to understand Also refer to the drawing product information for structure and specification of this product Confirm operating environment is within operating specificat...

Page 2: ...afety Instructions 3 pg 1 Specifications 5 pg 2 How to Order 6 pg 3 Construction Operation 7 pg 4 Precautions 9 pg 5 Spare Parts 11 pg 6 Maintenance 11 pg 7 Troubleshooting 12 pg Attachment Maintenanc...

Page 3: ...failure when configuring the equipment 2 Only personnel with appropriate training should operate machinery and equipment The product specified here may become unsafe if handled incorrectly The assembl...

Page 4: ...e incurred due to the failure of the product 3 Prior to using SMC products please read and understand the warranty terms and disclaimers noted in the specified catalog for the particular products 1 Th...

Page 5: ...Switch D A93 Operating temperature 20 60 Main material of vacuum part Seal material FKM Mechanical parts Bellows AM350 Gate A6063 Body A5052 Bonnet A6061 Gate Bolt SUS316 Others SUS304 Piping size Rc...

Page 6: ...sub connector CDE 9SF05 made by HIROSE ELECTRIC CO LTD is recommended for the connector female type XGTP 312 50336 1CN Applicable water size For 300mm wafer Valve type 1 Insert type Without body 2 Cas...

Page 7: ...7 Figure 2A Figure 2B Figure 2C 3 Construction Operation Bonnet Assembly Figure 1...

Page 8: ...em design and peripheral components can impact precision Gate valve performance by altering target operating pressures Fully completing OPEN CLOSE cycles are imperative to prevent damaging the valve c...

Page 9: ...o removal of Bonnet assembly during maintenance procedures If Bonnet assembly is removed at CLOSE condition then Body s threads and critical sealing surfaces could be damaged 4 4 End lock release When...

Page 10: ...Cover on the actuating part The cover shields internal components while the Gate valve is operating prevent injury 6 Remove the pneumatic tubing from valve operation and confirm cylinder has no pressu...

Page 11: ...P300 2 1S XGTP31 50336 Bellows Assembly XGTP300 20AS XGTP31 50336 O Ring Body opening side FKM XGT300 9 10S XGTP31 50336 AS568 273 O ring Gate FKM XGT300 9 9S XGTP31 50336 1 AS568 271 Kalrez 4079 XGT3...

Page 12: ...mage of Bellow assembly Replace Bellows assembly Deterioration of O ring by processing Replace with new O ring whose material compatible with process environment Scratches on the seal surface Polish o...

Page 13: ...ure for maintenance 1 Pneumatically open gate valve 2 Loosen bolts at bonnetassembly 8pcs 3 Remove bonnet assembly from body Step 2 Remove Gate 1 Remove gate bolts 2pcs 2 Carefully remove gate from sh...

Page 14: ...entation of washer and thrust washer during disassembly 3 Remove bellows assembly Remove bellows clamps 2pcs on Lever assembly The bellows should be handled carefully and cleaned with clean room grade...

Page 15: ...ws clips Attach Bellows clips to Bellows assembly by mounting bolts Bellows is located in Bonnet assembly by mounting bolts Ensure that Bellows assembly is secured at collar Tightening torque 3 0 0 3...

Page 16: ...ve with clean room grade alcohol and wipes ethanol grade 1 Alpha wiper equivalent Careful handling is critical to prevent scratches and dents to seal surface of O ring groove Note When removing O ring...

Page 17: ...ng groove 2 Tighten Bolts 8pcs Tightening torque 17 5 2 Nm Step 6 Install Gate 1 Mounting Gate to Shaft Confirm proper orientation of gate when installing on shaft Reference groove for Gate O ring 2 A...

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