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11 

 

5

Spare Parts List

For XGTP312-50336-***

Description

Orderable Part No.

Applicable Part No

Note

Body Assembly

XGT300-1-1AS 

XGTP312-50336-***

-

For XGTP313-50336-***

Description

Orderable Part No.

Applicable Part No

Note

Body Assembly

XGT300-1-1-3AS 

XGTP313-50336-***

-

Common Spare Parts List

Description

Orderable Part No.

Applicable Part No

Note

Bonnet Assembly

XGTP311-50336A1-1*

XGTP31* -50336-1**

or

XGTP31*-50336-2**

-

XGTP311-50336A1-1A*

XGTP31* -50336-* A*

-

XGTP311-50336A1-1C*

XGTP31* -50336-* C*

-

XGTP311-50336A1-1F*

XGTP31* -50336-* F*

-

Gate Assembly

XGTP300-2-1S

XGTP31* -50336-***

-

Bellows Assembly

XGTP300-20AS

XGTP31* -50336-***

-

O-Ring (Body opening side)

FKM

XGT300-9-10S

XGTP31* -50336-***

AS568-273

O-ring (Gate)

FKM

XGT300-9-9S

XGTP31* -50336-1**

AS568-271

Kalrez 

4079

XGT300-9-11S

XGTP31* -50336-2**

O-Ring (Bonnet Assembly)

FKM

XGT300-9-7S

XGTP31* -50336-***

AS568-177

Gate Bolt

XGT300-2-5S

XGTP31* -50336-***

-

How to order for Bonnet Assembly

XGTP311-50336A1- 1 *  *

Connected connector of Auto switch (Female type)

Description

Orderable Part No.

Applicable Part No

Note

Straight plug

XGT0402-9-12S 

For XGTP31* -50336-* C*

C016 30D006 100 12(AMP)

6. Maintenance

Without Gate

Auto switch and the connector
(See Table 1)

End Lock
Nil: OPEN/CLOSE end lock
N  : None

Warning

Please refer to the attached “ Procedure for maintenance”

 

Summary of Contents for XGTP 312-50336-1CN

Page 1: ...his operation manual thoroughly to understand Also refer to the drawing product information for structure and specification of this product Confirm operating environment is within operating specificat...

Page 2: ...afety Instructions 3 pg 1 Specifications 5 pg 2 How to Order 6 pg 3 Construction Operation 7 pg 4 Precautions 9 pg 5 Spare Parts 11 pg 6 Maintenance 11 pg 7 Troubleshooting 12 pg Attachment Maintenanc...

Page 3: ...failure when configuring the equipment 2 Only personnel with appropriate training should operate machinery and equipment The product specified here may become unsafe if handled incorrectly The assembl...

Page 4: ...e incurred due to the failure of the product 3 Prior to using SMC products please read and understand the warranty terms and disclaimers noted in the specified catalog for the particular products 1 Th...

Page 5: ...Switch D A93 Operating temperature 20 60 Main material of vacuum part Seal material FKM Mechanical parts Bellows AM350 Gate A6063 Body A5052 Bonnet A6061 Gate Bolt SUS316 Others SUS304 Piping size Rc...

Page 6: ...sub connector CDE 9SF05 made by HIROSE ELECTRIC CO LTD is recommended for the connector female type XGTP 312 50336 1CN Applicable water size For 300mm wafer Valve type 1 Insert type Without body 2 Cas...

Page 7: ...7 Figure 2A Figure 2B Figure 2C 3 Construction Operation Bonnet Assembly Figure 1...

Page 8: ...em design and peripheral components can impact precision Gate valve performance by altering target operating pressures Fully completing OPEN CLOSE cycles are imperative to prevent damaging the valve c...

Page 9: ...o removal of Bonnet assembly during maintenance procedures If Bonnet assembly is removed at CLOSE condition then Body s threads and critical sealing surfaces could be damaged 4 4 End lock release When...

Page 10: ...Cover on the actuating part The cover shields internal components while the Gate valve is operating prevent injury 6 Remove the pneumatic tubing from valve operation and confirm cylinder has no pressu...

Page 11: ...P300 2 1S XGTP31 50336 Bellows Assembly XGTP300 20AS XGTP31 50336 O Ring Body opening side FKM XGT300 9 10S XGTP31 50336 AS568 273 O ring Gate FKM XGT300 9 9S XGTP31 50336 1 AS568 271 Kalrez 4079 XGT3...

Page 12: ...mage of Bellow assembly Replace Bellows assembly Deterioration of O ring by processing Replace with new O ring whose material compatible with process environment Scratches on the seal surface Polish o...

Page 13: ...ure for maintenance 1 Pneumatically open gate valve 2 Loosen bolts at bonnetassembly 8pcs 3 Remove bonnet assembly from body Step 2 Remove Gate 1 Remove gate bolts 2pcs 2 Carefully remove gate from sh...

Page 14: ...entation of washer and thrust washer during disassembly 3 Remove bellows assembly Remove bellows clamps 2pcs on Lever assembly The bellows should be handled carefully and cleaned with clean room grade...

Page 15: ...ws clips Attach Bellows clips to Bellows assembly by mounting bolts Bellows is located in Bonnet assembly by mounting bolts Ensure that Bellows assembly is secured at collar Tightening torque 3 0 0 3...

Page 16: ...ve with clean room grade alcohol and wipes ethanol grade 1 Alpha wiper equivalent Careful handling is critical to prevent scratches and dents to seal surface of O ring groove Note When removing O ring...

Page 17: ...ng groove 2 Tighten Bolts 8pcs Tightening torque 17 5 2 Nm Step 6 Install Gate 1 Mounting Gate to Shaft Confirm proper orientation of gate when installing on shaft Reference groove for Gate O ring 2 A...

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