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10 

 

4-5

Speed control

Be sure to control speed to open and close the gage in 

meter out 

condition.  Otherwise,  the  Gate  valve  life  will  

be  adversely  affected.  Improper  use  of  speed  controls  can  damage end-lock mechanism as well as shorten life 
time of valve. 

4-6

Exhaust piping

Avoid system designs that combine additional solenoid valves to the Gate valve.  The added exhaust pressures from 
other solenoid valves may cause improper operation of the end lock mechanism.

4-7

Operation of valve

1) 

Please confirm in regulated differential pressure of 4kPa and during the opening and shutting operation of the 

valve. 

OPEN / CLOSE

2) 

Incase the 

Body (Chamber) 

and 

Gate

are heated and cooling gradually from High Temperature to Room 

temperature then please make 

OPEN 

condition. If it is cooling at 

CLOSE 

condition then Gate O -ring 

could become stuck and when operated to 

OPEN 

condition.  This condition will pull out the O-ring

Warning

3) 

Maintain and monitor 

specified

operating pressure range of Gate valve.  System design can change over time 

providing 

Over/Under 

pressurization.  The internal components could be damaged by improper pressure.

4) 

Do not put your hands near moving components or into the opening of the body without confirming safety.  The 

closing forces will cause injury and bodily harm if the valve is operated. 

5) 

Do not remove the Cover on the actuating part. The cover shields internal components while the Gate valve is 

operating prevent injury. 

6) 

Remove the pneumatic tubing from valve operation and confirm cylinder has no pressure prior to maintenance.  

Be aware of your system design and latent energy stored to prevent accidental actuation.  These steps will ensure 
that stored energy is removed.  Additionally, pneumatic lines disconnected could create a potential hazard if 
energized.

Caution

4-8

Replacement of O-ring 

Use the parts shown on “4. Replacement parts list” when replacing bonnet assembly, Gate and O

-rings for a gate. 

Give sufficient cleaning to O-ring groove and mount O-ring in gland avoiding twisting. Use a plastic specific tool so as 
not to damage sealing surface of the O-ring groove. Refer to the maintenance manual for details. After replacement, 
confirm vacuum by leak inspection. 

Warning

4-9

Return of Product

Vacuum products must be decontaminated prior to returning to SMC.  The substances used in process application 
must be identified with certified removal of contaminants.  The return authorization number will only be provided 
after the decontamination form has passed evaluation.  The decontamination form is submitted by Product Return 
Request Sheet or Detoxification/Decontamination certificate to SMC and await return contact from SMC before 
returning the item to SMC.  Please refer to International Chemical Safety Cards (ICSC) for a list of the harmful 
substances.  If you have any questions, please contact your SMC sales representative. 

 

Summary of Contents for XGTP 312-50336-1CN

Page 1: ...his operation manual thoroughly to understand Also refer to the drawing product information for structure and specification of this product Confirm operating environment is within operating specificat...

Page 2: ...afety Instructions 3 pg 1 Specifications 5 pg 2 How to Order 6 pg 3 Construction Operation 7 pg 4 Precautions 9 pg 5 Spare Parts 11 pg 6 Maintenance 11 pg 7 Troubleshooting 12 pg Attachment Maintenanc...

Page 3: ...failure when configuring the equipment 2 Only personnel with appropriate training should operate machinery and equipment The product specified here may become unsafe if handled incorrectly The assembl...

Page 4: ...e incurred due to the failure of the product 3 Prior to using SMC products please read and understand the warranty terms and disclaimers noted in the specified catalog for the particular products 1 Th...

Page 5: ...Switch D A93 Operating temperature 20 60 Main material of vacuum part Seal material FKM Mechanical parts Bellows AM350 Gate A6063 Body A5052 Bonnet A6061 Gate Bolt SUS316 Others SUS304 Piping size Rc...

Page 6: ...sub connector CDE 9SF05 made by HIROSE ELECTRIC CO LTD is recommended for the connector female type XGTP 312 50336 1CN Applicable water size For 300mm wafer Valve type 1 Insert type Without body 2 Cas...

Page 7: ...7 Figure 2A Figure 2B Figure 2C 3 Construction Operation Bonnet Assembly Figure 1...

Page 8: ...em design and peripheral components can impact precision Gate valve performance by altering target operating pressures Fully completing OPEN CLOSE cycles are imperative to prevent damaging the valve c...

Page 9: ...o removal of Bonnet assembly during maintenance procedures If Bonnet assembly is removed at CLOSE condition then Body s threads and critical sealing surfaces could be damaged 4 4 End lock release When...

Page 10: ...Cover on the actuating part The cover shields internal components while the Gate valve is operating prevent injury 6 Remove the pneumatic tubing from valve operation and confirm cylinder has no pressu...

Page 11: ...P300 2 1S XGTP31 50336 Bellows Assembly XGTP300 20AS XGTP31 50336 O Ring Body opening side FKM XGT300 9 10S XGTP31 50336 AS568 273 O ring Gate FKM XGT300 9 9S XGTP31 50336 1 AS568 271 Kalrez 4079 XGT3...

Page 12: ...mage of Bellow assembly Replace Bellows assembly Deterioration of O ring by processing Replace with new O ring whose material compatible with process environment Scratches on the seal surface Polish o...

Page 13: ...ure for maintenance 1 Pneumatically open gate valve 2 Loosen bolts at bonnetassembly 8pcs 3 Remove bonnet assembly from body Step 2 Remove Gate 1 Remove gate bolts 2pcs 2 Carefully remove gate from sh...

Page 14: ...entation of washer and thrust washer during disassembly 3 Remove bellows assembly Remove bellows clamps 2pcs on Lever assembly The bellows should be handled carefully and cleaned with clean room grade...

Page 15: ...ws clips Attach Bellows clips to Bellows assembly by mounting bolts Bellows is located in Bonnet assembly by mounting bolts Ensure that Bellows assembly is secured at collar Tightening torque 3 0 0 3...

Page 16: ...ve with clean room grade alcohol and wipes ethanol grade 1 Alpha wiper equivalent Careful handling is critical to prevent scratches and dents to seal surface of O ring groove Note When removing O ring...

Page 17: ...ng groove 2 Tighten Bolts 8pcs Tightening torque 17 5 2 Nm Step 6 Install Gate 1 Mounting Gate to Shaft Confirm proper orientation of gate when installing on shaft Reference groove for Gate O ring 2 A...

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