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-22-
No.PF##-OMJ0016
Specification
■
Specifications
Model
PFM510
PFM525
PFM550
PFM511
Measured fluid
Dry air, N
2,
Ar, CO
2
(Air quality class is JIS B8392-1 1.1.2 to 1.6.2, ISO8573-1 1.1.2 to 1.6.2)
Dry air, N
2
, Ar
0.2 to 10 L/min
0.5 to 25 L/min
1 to 50 L/min
2 to 100 L/min
Rated flow
range*
(measurement
range)
CO
2
0.2 to 5 L/min
0.5 to 12.5 L/min
1 to 25 L/min
2 to 50 L/min
Accuracy
±3%F.S. or less
Repeatability
±1%F.S. or less (Fluid: Dry air)
Pressure characteristic
±5%F.S. or less (0.35 MPa reference)
Temperature characteristics
±2%F.S. or less (15 to 35
°
C)
±5%F.S. or less (0 to 50
°
C)
Operating pressure range
-70 kPa to 750 kPa
Proof pressure
1 MPa
Response time
50 msec. or 1 s.
(Response time selecting function: 1s. is set when no voltage is input.)
Voltage output
Output voltage: 1 to 5 V
Output impedance: 1 k
Ω
Analog output
*
Current output
Output current: 4 to 20 mA
Max. load impedance: 600
Ω
, Min. load impedance: 50
Ω
Indicator light
Power ON indicator: Light is lit up while power is supplied (Green)
Fluid indicator: Light flashes on and off while flow is running (Green)
Source voltage
24 VDC±10%
Power consumption
35 mA or less
Enclosure IP40
Operating fluid
temp.
0 to 50
°
C (No freezing or condensation)
Operating
temp. range
Operating: 0 to 50
°
C, Stored: -10 to 60
°
C (No freezing or condensation)
Operating
humidity range
Operating, stored 35 to 85%R.H. (No condensation)
Withstand
voltage
1000 VAC, 1 min. Between external terminals and case
Insulation
resistance
50 M
Ω
or more (500 VDC Mega) Between external terminals and case
Vibration
resistance
Without flow adjustment valve: 10 to 500 Hz at whichever smaller
1.5 mm amplitude or 98 m/s
2
acceleration in X, Y, Z
directions for 2 hours each (un-powered)
With flow adjustment valve: 10 to 150Hz at whichever smaller
1.5 mm amplitude or 19.6 m/s
2
acceleration in X, Y, Z
directions for 2 hours each (un-powered)
Resistance
Impact
resistance
490 m/s
2
X, Y, Z directions 3 times for each (un-powered)
*: The reference of the flow unit is the standard condition (20
°
C, 1 atm, 65%R.H.).
Summary of Contents for PFM5 Series
Page 1: ...No PF OMJ0016 Flow sensor PRODUCT NAME PFM5 Series MODEL Series ...
Page 10: ... 9 No PF OMJ0016 Model Indication Method ...
Page 26: ... 25 No PF OMJ0016 Dimensions PFM5 N 01 N 02 F01 1 2 Connector dimensions ...
Page 27: ... 26 No PF OMJ0016 PFM5 N 01L N 02L F01L 1 2 ...
Page 28: ... 27 No PF OMJ0016 PFM5 S N 01 N 02 F01 1 2 ...
Page 29: ... 28 No PF OMJ0016 PFM5 S N 01L N 02L F01L 1 2 ...
Page 30: ... 29 No PF OMJ0016 PFM5 F02 1 2 ...
Page 31: ... 30 No PF OMJ0016 PFM5 F02L 1 2 ...
Page 32: ... 31 No PF OMJ0016 PFM5 S F02 1 2 ...
Page 33: ... 32 No PF OMJ0016 PFM5 S F02L 1 2 ...
Page 34: ... 33 No PF OMJ0016 PFM5 C N 1 2 ...
Page 35: ... 34 No PF OMJ0016 PFM5 C N L 1 2 ...
Page 36: ... 35 No PF OMJ0016 PFM5 S C N 1 2 ...