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-94-
No.PF
※※
-OMY0005
■
Error display
Error name
Error display
Description
Measures
Instantaneous flow
error
Flow rate exceeding the upper limit
of the settable flow range is applied.
Reset applied flow rate to a level within
the settable flow range.
Pressure error
Pressure exceeding the upper limit
of the set pressure range is applied.
Reset applied pressure to a level within
the set pressure range.
Pressure below the lower limit of the
set pressure range is applied.
Temperature error
Temperature exceeding the upper
limit of the set temperature range is
applied.
Reset applied temperature to a level
within the settable temperature range.
Temperature below the lower limit of
the set temperature range is applied.
Over current error
The switch output load current is
80 mA or more.
Turn the power off and remove the
cause of the over current. Then supply
the power again.
System error
An internal data error has occurred.
Turn the power off and on again.
If the failure cannot be solved, contact
SMC.
to