High Purity Chemical Valve
Compact Type
Space saving, compact type is available.
Compact type is introduced as a new series to complement
conventional Series LVC with integral fittings.
Select a series according to the flow rate and
installation requirements.
Mounting base dimensions conform to SEMI
Standard, F65-1101. (Except for LVD10)
Body
:
New
PFA
Diaphra
gm:
PTFE
Actuator section:
PPS
Body
:
New
PFA
Diaphra
gm:
PTFE
Actuator section:
PPS
Body
:
New
PFA
Diaphra
gm:
PTFE
Actuator section:
PPS
Space saving, compact type is available.
Class2
LVC20
54.5
79
LVD20
54.5
67
Class3
79
106
LVD30
79.5
83
Class4
96
131
LVC40
LVD40
82
93
Class5
LVC50
129
154
LVD50
105.5
114
A
B
(mm)
Dimension across inlet/
outlet ports: Reduced by up to
29
%
Dimension across inlet/
outlet ports: Reduced by up to
29
%
A
LVC
B
LVD
q
e
w
r
Body
Actuator section
Integral clean one-touch fitting construction
(Series KP is used.)
Can select female thread (M5 x 0.8).
Piping from 4 directions are possible.
(Made to Order)
Integral fittings construction
HYPER FITTING
®
‚
Series LQ1 is used.
Series
LVD
Integral tubing (construction)
CAT.ES70-24 -UK
A
LVC30