METIRIO
ENCODER
USER MANUAL
Page 1: ...METIRIO ENCODER USER MANUAL...
Page 2: ...fully and is updated constantly Nevertheless it is not possible to fully exclude the presence of errors In order to always get the latest information please contact our technical sales team SmarAct Me...
Page 3: ...utions 15 2 7 Notes on Maintenance 18 3 Working Principle 19 3 1 General Working Principle 19 3 2 Typical Output Signals 20 4 Technical Data 22 4 1 Absolute Maximum Ratings 22 4 2 Electrical Data 22 4...
Page 4: ...IO Readhead Soldering Precautions 47 5 3 METIRIO Readhead Alignment to Scales 48 5 3 1 Alignment to Linear Scales 50 5 3 2 Alignment to Rotary Scales 52 5 3 3 Alignment to Goniometer Scales 53 5 3 4 A...
Page 5: ...on 20 mA Ultra high vacuum UHV compatibility Multiple linear convex and rotary scale options Applications Rotary encoders Linear encoders Robots Linear motors Precision stages Galvanometers 1 2 METIRI...
Page 6: ...consists of a readhead combined with a measuring scale It is intended that the read head is connected to a motion controller which provides the power supply and is capable to inter pret and further p...
Page 7: ...er s controller is uncapable to interprate the analog signals The IM can directly be connected to the METIRIO A1 D Sub 15 connector ENCODER EVALUATION MODULE EEM The EEM is a box that can be connected...
Page 8: ...mprising the METIRIO A1 the EES the EEM and the EEP Figure 1 3 ENCODER EVALUATION KIT 1 3 Preface This manual will help you to install and operate the METIRIO Encoder safely in its intended use scenar...
Page 9: ...and safety symbols picto rial hazard alerts 1 5 1 Signal Words Four signal words are used in this documentation DANGER WARNING CAUTION and NOTICE The signal words DANGER WARNING and CAUTION designate...
Page 10: ...s symbol is intended to alert the operator to the presence of hot surfaces of the product that may be of su cient magnitude to constitute a risk of burning 1 6 Warranty and Liability The general terms...
Page 11: ...the intrusion of foreign objects 1 7 Life Support Policy DANGER SmarAct Metrology GmbH Co KG does not authorize or warrant any of its prod ucts for use in life support systems without the speci c wri...
Page 12: ...Photobiological safety of lamps and lamp systems The integrated light source is classi ed to be RG 0 free group only if the supply current is limited to 1000 mA DIN EN IEC 63000 2019 05 Technical doc...
Page 13: ...an OEM product that can be integrated into or mounted on any kind of machinery with movable axes to detecte the relative movement to the scale Users are free to choose both the mounting on the movable...
Page 14: ...order to continuously maintain reliable position signals especially during closed loop position ing or any other critical operation the following notices are advised Do not interrupt the power supply...
Page 15: ...ype The energy provided by secondary electronics should be limited to safe values according to DIN EN 61010 1 2020 03 or other applicable standards NOTICE ESD electrostatic discharge sensitive device...
Page 16: ...s CAUTION Do not operate the METIRIO encoder under water This will lead to short circuit of the device Operation in distilled water or other non conductive liquids will also cause the device to be opt...
Page 17: ...ight or direct sunlight Use gloves or plastic tweezers to touch the device in order to protect the device from con tamination Do not use metal tweezers In order to avoid malfunction do not cover the o...
Page 18: ...uality Clean the glass surface of the readhead or the scale with care Use proper tissues in order to not scratch while cleaning In order to maintain UHV capability do not use Acetone or any other chem...
Page 19: ...e photoiode ampli ers These settings can be changed and stored to the memory via the chip s digital interface With proper settings the light source illuminates the scale which will re ect the light ba...
Page 20: ...to count and increment the integer period count number n each time the phase crosses zero Finally the displacement is X n P XP 3 2 We are used to looking at electrical signals as a function of time f...
Page 21: ...e ENCODER EVALUATION PRO GRAM However any controller that provides an I2 C interface can be utilized to adjust these sig nals For further details on the digital curcuit block of the ASIC see chapter 4...
Page 22: ...AEC Q101 4 kV Max radiant output power max short circuit current IF 1000 mA 360 mW Ambient pressure p 10 11 mbar 4 2 Electrical Data Table 4 2 General electro optical characteristics Parameter Symbol...
Page 23: ...GND Ground 5 VDD in power supply 13 GPO out digital 6 URef out RS485 14 GPI in digital 7 URef out RS485 15 d n c do not connect 8 GND Ground 16 GND Ground When a HIGH voltage is applied to the power...
Page 24: ...ure 4 2 Pin assignment of the D Sub 15 male connector of the METIRIO A1 Pin Description Pin Description 1 n c 9 n c 2 n c 10 SCL 3 n c 11 SDA 4 GND 12 Usin 5 Usin 13 Ucos 6 Ucos 14 URef 7 URef 15 VDD...
Page 25: ...ircuit Block Diagram Figure 4 4 Block diagram of the mixed signal integrated circuit ASIC The METIRIO readhead comprises an integrated mixed signal ASIC with digital and analog blocks www smaract com...
Page 26: ...d out puts analog incremental position signals In addition the ASIC provides a digital interface for communication with the customer controller to make settings and address some special features METIR...
Page 27: ...able length wherever possible Avoid routing the reference trace in parallel and close to the analog signals to reduce the reference signal switching noise from coupling into the analog signal For sing...
Page 28: ...0 47 mA Di erential nonlinearity 0 2 0 2 LSB Integrated nonlinearity 0 7 0 1 LSB LED loop mode enabled Register 0x0208 with D1 1 Voltage Setpoint sum of TIA outputs 1 2 2 4 V Resolution 6 bit DAC 63 S...
Page 29: ...onlinearity 0 65 0 95 LSB Integrated nonlinearity 0 2 1 LSB The analog incremental signals can be adjusted regarding gain and o set An exemplary picture of perfectly adjusted signals is shown in secti...
Page 30: ...width and position can be adjusted in a way that it equals only one period Here we describe how this conversion works and how this signal can be adjusted The basic principle of the reference pulse ad...
Page 31: ...a change in the opposite direction will change the width of the reference mark For the two thresholds Di 1 and Di 2 the user can switch between two resolutions the standard resolution and the increas...
Page 32: ...1000 pF Di 1 and Di 2 Comparator Setpoints Voltage 0 96 0 96 V Resolution 8 bit DAC 255 Steps Step size 7 5 mV Di erential nonlinearity 0 1 0 1 LSB Integrated nonlinearity 0 25 0 1 LSB Hysteresis abso...
Page 33: ...he digital block is summarized Further programming reference and a detailled register description can be found in the user guide UG OE00001 which is downloadable on our homepage and available on reque...
Page 34: ...repeated start Hold time tHD Start rst clock pulse hereafter 0 6 s Setup time tSU Start 0 6 s SDA setup Hold time tHD Data 0 ns Setup time tSU Data 100 ns SCL and SDA 70 to 30 Rise time tr 300 ns Fall...
Page 35: ...perations a temperature range from 18 C to 140 C is applicable but not reccomended However long term usage at high temeratures can reduce the product life time Operation at low temperature and high hu...
Page 36: ...mm2 Pad pitch 0 75 mm 4 4 2 Dimensional Outline METIRIO A1 Figure 4 11 Dimensional outline METIRIO A1 The METIRIO A1 housing encloses the METIRIO Readhead The cover glass on the top is ush with the ou...
Page 37: ...ptoelec tronic components from the inside to the soldering pads on the bottom side The robust frame ensures mechanical stability and can be used for mounting and handling purposes Venting slots at the...
Page 38: ...mbH Co KG provides compatible scales which have been tested with METIRIO encoders SmarAct does not guarantee correct operation if custom scales are used that do not meet the design speci cations given...
Page 39: ...eriodical grating with alternating re ective and non re ective lines Grating type amplitude grating Grating pitch 20 m Aperture ratio 50 50 up to 70 30 Re non Re Reference Mark Speci cation Compatible...
Page 40: ...mm However no aditional bene t regarding signal quality can be achieved with broader scales The incremental track is an amplitude grating which generates the interference pattern The pe riod often re...
Page 41: ...ion line B A radial from disc center resulting in radial fanout dOC dTS Figure 4 16 Main parameters of rotary scales The main characteristic of a rotary scale is the optical diameter dOC The reference...
Page 42: ...ending a linear scale over a speci ed ra dius is used for goniometer applications where rotation around a x pivot point is achieved Due to the bending the inter ference pattern will distort and the al...
Page 43: ...marks must be greater than 1 5 mm The size of a reference mark in the direction of motion X should be 25 periods or 0 5 mm 0 1 mm Each reference mark shall have the same size and shape Violation of th...
Page 44: ...is unique There is no need to move across the entire length of the scale for referencing A disatvantage of this code is however that for very long scales the increasing distance might lead to very la...
Page 45: ...7 9 94 8 80 08 504 10 08 and so on The gures and tables in this section give the exact de nition for coded scales that can be pur chased at SmarAct Metrology GmbH Co KG Please notice that these de nit...
Page 46: ...Customized soldering ensures precision and reliability for speci c integration requirements The METIRIO Readhead ip chip package can be either glued or soldered For soldering gluing it is either direc...
Page 47: ...The designer of the circuit board has to ensure that this unit has proper mechanical interfaces for mounting Thermal performance is directly linked to the PCB design and operative environment Careful...
Page 48: ...r hand in most cases the scale disc is mounted on the movable part and the encoder is connected to the stationary part of the housing Due to the various possible application scenarios SmarAct Metrolog...
Page 49: ...dhead If your mounting xture has adjustable degrees of freedom the best way to ensure tolerances is to observe the signals live during alignment Do not lock the readhead until you have reached an opti...
Page 50: ...t within the optimum position The signal quality will gradually be reduced when deviations from this position occur Reduced signal quality is indicated by decreasing circle diameter and deviation in s...
Page 51: ...rks In this case ME TIRIO will anyway read just one of the reference tracks Take special care to the orientation of the readhead to such scales Choose one of the reference tracks and ignore the other...
Page 52: ...ned on track separation line 0 7 mm Figure 5 11 Alignment to rotary scales Most important for rotary scales is the optical center line OCL The optical centerline and the track separation line should h...
Page 53: ...tilt angle RX B A Figure 5 14 Tilting the readhead In order to minimize phase error a tilted orientation is reccomended when using goniometer scales The Working Distance is 0 5 mm in stead of 1 18 mm...
Page 54: ...TIRIO A1 The SmarAct Logo shall be on the same side as the incremental track A The working distance is unchanged since the glass surface of the readhead is ush with the external housing The readhead i...
Page 55: ...6 APPENDIX ORDER CODES 6 1 METIRIO Readheads Order Codes Figure 6 1 Order codes for METIRIO readheads www smaract com Page 55 Metirio Encoder User Manual...
Page 56: ...6 APPENDIX ORDER CODES Figure 6 2 Valid combinatinos for readhead order codes www smaract com Page 56 Metirio Encoder User Manual...
Page 57: ...scales Please note that not every combinaton of scale parameters is valid Please contact Sales for assistance in selecting an appropriate scale and technical drawings The outer diameter is at least 1...
Page 58: ...6 APPENDIX ORDER CODES 6 3 METIRIO Accessories Order Codes Figure 6 4 Order codes for compatible accessories www smaract com Page 58 Metirio Encoder User Manual...
Page 59: ...6 APPENDIX ORDER CODES Figure 6 5 Valid combinations and examples of order codes for modules Figure 6 6 Order code for a complete starter kit www smaract com Page 59 Metirio Encoder User Manual...
Page 60: ...pean Union SmarAct respects the manufacturer s product responsibility and will take care of environmentally correct disposal of old SmarAct products free of charge To dispose old SmarAct equipment you...
Page 61: ...e Anning Zhuang Road Haidian District Beijing China T 86 18 616 715 058 Email chenye nano stage com www nano stage com Shanghai Kingway Optech Co Ltd Room 1212 T1 Building Zhonggeng Global Creative Ce...
Page 62: ...urnkey scanning microscopes which can be used in vacuum cryogenic or other harsh environments We maintain the complete production in house for a high level of customization so that we can always provi...
