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Description
3.5 Functional principle
SITRANS P500 with HART
Operating Instructions, 12/2014, A5E02344528-09
27
3.5.2.1
Measuring cell for differential pressure and flow rate
①
Silicon pressure sensor
⑥
Overload diaphragm
②
Inlet pressure P
+
⑦
Filling liquid
③
Process flange with process connection
⑧
Seal diaphragm
④
O-ring
⑨
Inlet pressure P
-
⑤
Measuring cell body
Figure 3-6
Function diagram of the measuring cell for differential pressure and flow rate
●
The differential pressure is transmitted via the seal diaphragm
⑧
and the fill fluid
⑦
to
the silicon pressure sensor
①
.
●
If the measuring limits are exceeded, the overload diaphragm
⑥
flexes until the seal
diaphragm
⑧
touches the body of the measuring cell
⑤
. This protects the silicon
pressure sensor
①
against overload.
●
Differential pressure causes the measuring diaphragm of the silicon pressure sensor to
be displaced. The displacement changes the resistance value of the four doped piezo
resistors arranged in a bridge circuit in the measurement diaphragm.
●
The change in resistance causes the bridge output voltage to vary in proportion to the
differential pressure.
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