SENSIRION SFC53 Series, Manual, Page: 6 / 11

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6. Fluidic and electrical connectors
Table 2 Fluidic and electrical connectors
Product reference Fluidic connector
Electrical
connector
SFC5500/
SFM5500
Factory fitted with Legris
G ¼’’ flange (exchangeable fittings)
Compatible with Legris, Swagelok, Festo, Serto fittings (and others)
DB9
SFC5400/
SFM5400
Swagelock, VCO, VCR, Downmount DB9
SFC5460/
SFM5460
Swagelock, VCO, VCR, Downmount JST 4-pin*
SFC5300/
SFM5300
Downmount DB9
SFC5330/
SFM5330
Downmount JST 4-pin*
*Please ask Sensirion for an adapter, if used with EK-F5x evaluation kit.
6.1. Downmount interface
When using products with downmount connectors, a specific manifold must be designed and manufactured by the user.
In Table 4 in the
“Useful resources” Section 8.1 , CAD models for a suggested manifold designs for SFC54xx / SFM54xx and
SFC53xx / SFM53xx can be found. They can be used as a starting point for a custom design.
The required O-rings for sealing are not provided by Sensirion. Suggestions are provided in the Table 4 in “Useful resources”
Section 8.1 . It is recommended to use the same sealing materials as inside the Mass Flow Controller (see datasheet) to
ensure material compatibility with the used gasses.
Description of the manifolds:
•
SFx54xx: 4 screws can be used for mounting. The O-rings must be placed on the mass flow controller side. The
manifold pictured below can be used as a starting point for the design. A Mass Flow Controller is placed on top
of the manifold.
Figure 2 Suggested manifold design for SFC54xx / SFM54xx