Q150T Sample Preparation System
Q150T - Instruction Manual
81
10473 - Issue 5
Table 27
Ramped profile parameters
Name
Default
Value
Minimum
Value
Maximum
Value
Comment
Evaporation
Current
46
5
60
Maximum evaporation current.
Evaporation time
(min)
1.5
0.1
4
The time the current is applied.
Starts when the evaporation
Current exceeds Pre Evap end
current.
Out Gas Time (s)
10
2
120
Time cord or rod is outgassed.
Outgas Current
20
2
50
Time cord or rod is outgassed
before pulse cycle(s).
Pre Evap Rate*
(A/S)
1
0.5
20
Rate at which the current is
increase after the outgas time.
PreEvap End
current (A)
32
0
60
The output current at which the
above ramp rate is stopped.
The evaporation time is started
at this point.
Current Ramp
Rate (A/S)
0.20
0.01
20
Rate at which the current is
increase until the value of
Evaporation current property is
reached.
Tooling Factor
1.0
0.1
10
Tooling factor for this process.
Pump hold*
No
No
Yes
If Yes the process will pump
down to an outgas ready state
and wait for user input. After the
System>Vacuum>Pump hold
time has expired the system
will vent the chamber.
Flush chamber*
No
No
Yes
Set to
Yes
to flush chamber
with nitrogen before pumping
down.
* Admin group level required to edit this property
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