Quorum Q150T S, Instruction Manual

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Q150T Sample Preparation System
Q150T - Instruction Manual
75
10473 - Issue 5
8.2 Troubleshooting
Routine service should not be necessary. In the event of non-operation, carry out the
following checks.
CAUTION
Disconnect the power cord BEFORE carrying out any servicing
activities.
 Check power to Instrument.
 Check fuse.

Check vacuum pump local switch should be in 'on' position.

Check chamber seating for vacuum leaks.

Check operating conditions of Instrument controls.

Check target and connections.
 Check correct conditions for sputtering have been set.
 Check all connections.
8.3 Error Messages
Table 21 Error Messages
Error messages Description of fault
Invalid group name The name entered is ether to long or the same as a
existing group
Maximum groups Reached
Up to 20 groups allowed
Selected material not found in
material list cannot continue with
coating? The specified material in the profile has been removed
from the material list
Name already exists The name entered is the same as an existing
profile/Material
Name is too long
The name entered is longer than 19 characters
Cannot run process An unrecoverable undefined error has occurred in starting
a process.
This instrument does not support
this process The process run is not able to be run on this instrument
Evaporation PSU not found A Evaporation process has been run but the PSU is not
present or not communicating
Sputter PSU not found A sputtering process has been run but the PSU is not
present or not communicating
FTM crystal not oscillating. Please
check or replace
FTM crystal failed and needs to be replaced
FTM Tooling Factor less than 0.1 The Product of the material tooling factor and the profile
tooling factor to less than 0.1
FTM Tooling Factor greater than 20
The Product of the material tooling factor and the profile
tooling factor to greater than 20
Vacuum interlock not operated. Can
not proceed
The operational vacuum as indicated by the gauge has
been achieved but vacuum interlock switch has not
operated.
Current less than expected. Check
cord Process terminated
The measured current is less than 20% of the requested
value. Check that the cord is fitted correctly.
Cord voltage less expected. Check
insert for shorts
The voltage is less than 20% of the expected voltage.
(expected voltage= measured current/0.16). Check that
the correct type of cord is being used and there are no