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29
Revision 00 EN - 02/2022
MSM+ HB
35,0(6
Laser Beam
Measuring plane
Permissible z-
measurement range
Measuring plane distance
Measuring objective
Upper limit
Lower limit
x-axis
y-axis
z-axis
Beam hits measuring objective
centered and perpendicular
Fig. 7.1:
z-measurement range of the MSM+ HB
7.3.2
Mounting the cyclone
4 screws a.f. 2.5 mm
Cyclone and
alignment tool
Fig. 7.2:
Position of cyclone and alignment tool
The magnetically held alignment tool can fall down during shipping. Dirt may enter the objective. Therefore,
the objective of the MSM+ HB is closed with a black aperture lock.
You must remove the aperture lock on the objective first, then you can mount the cyclone.
Before removing the aperture lock, the area around the aperture must be cleaned with clean compressed air
and the purge air must be connected to the MSM+ HB.
Summary of Contents for MicroSpotMonitor Plus HighBrilliance
Page 2: ......
Page 3: ...3 Revision 00 EN 02 2022 MSM HB 35 0 6 IMPORTANT READ CAREFULLY BEFORE USE KEEP FOR FUTURE USE...
Page 7: ...7 Revision 00 EN 02 2022 MSM HB 35 0 6...
Page 95: ...95 Revision 00 EN 02 2022 MSM HB 35 0 6 13 Declaration of conformity...
Page 96: ...96 Revision 00 EN 02 2022 MSM HB 35 0 6...
Page 98: ...98 Revision 00 EN 02 2022 MSM HB 35 0 6 15 Dimensions 15 1 Dimensions of the MSM HB10 A...
Page 99: ...99 Revision 00 EN 02 2022 MSM HB 35 0 6 Dimensions of the MSM HB10 continued View A...
Page 100: ...100 Revision 00 EN 02 2022 MSM HB 35 0 6 15 2 Dimensions of the MSM HB10 with fibre bridge A...
Page 103: ...103 Revision 00 EN 02 2022 MSM HB 35 0 6 15 3 Dimensions of the MSM HB20 at zmax C...
Page 104: ...104 Revision 00 EN 02 2022 MSM HB 35 0 6 Dimensions of the MSM HB20 continued View C...