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10 Technical Data

42

Version: 1.0.0

PZ248E

P-56x Nanopositioners

10.3 Dimensions

Dimensions in mm. Note that the decimal places are separated by a comma in the
drawings.

Figure 10: P-56x.3CD and P-56x.3CL

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Summary of Contents for P-56 Series

Page 1: ...ion 1 0 0 Date 22 11 2013 This document describes the following products P 561 PIMars XYZ Nanopositioning System P 561 3CD 3CL 100 m 100 m 100 m P 561 3DD 45 m 45 m 15 m Direct Drive P 562 PIMars XYZ...

Page 2: ...no 7 449 077 Japanese patent no 4667863 Chinese patent no ZL03813218 4 2013 Physik Instrumente PI GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyrig...

Page 3: ...Recommended Piezo Controllers 13 3 6 Technical Features 13 3 6 1 PICMA Piezo Actuators 13 3 6 2 Flexure Guides 14 3 6 3 Capacitive Sensors 14 3 6 4 ID Chip Only Models With Sub D Connector 14 4 Unpac...

Page 4: ...eshooting 35 9 Customer Service 37 10 Technical Data 39 10 1 Specifications 39 10 1 1 Data Table 39 10 1 2 Maximum Ratings 40 10 2 Ambient Conditions and Classifications 41 10 3 Dimensions 42 10 4 Tor...

Page 5: ...knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typogr...

Page 6: ...isting of several steps whose sequential order must be observed Action consisting of one or several steps whose sequential order is irrelevant List item p 5 Cross reference to page 5 RS 232 Labeling o...

Page 7: ...hannel high performance amplifier PZ62E E 517 interface and display module PZ214E E 712 digital piezo controller PZ195E E 725 digital piezo controller PZ197E E 761 digital piezo controller PZ164E P 5x...

Page 8: ...d password protected manuals 1 Carry out steps 1 to 5 of the download process for freely accessible manuals 2 Insert the product CD in the PC drive 3 Switch to the Manuals directory on the CD 4 In the...

Page 9: ...mbination with suitable drive and control electronics p 13 available from PI The electronics is not included in the scope of delivery of the P 56x The electronics must provide the required operating v...

Page 10: ...ric shock max 130 V DC and minor injuries Do not touch the contacts in the connector Secure the connector of the stage with screws against being pulled out of the controller If a protective earth cond...

Page 11: ...ilable for download p 3 on our website Add all information given by the manufacturer to the user manual for example supplements or Technical Notes If you pass the P 56x on to other users also turn ove...

Page 12: ......

Page 13: ...el metrology Sub D connector s P 561 3CL PIMars XYZ nanopositioning system with large travel range 100 m 100 m 100 m capacitive sensors parallel metrology LEMO connector s P 561 3DD PIMars high dynami...

Page 14: ...logy Sub D connector s P 563 3CL PIMars XYZ nanopositioning system with large travel range 300 m 300 m 300 m capacitive sensors parallel metrology LEMO connector s 3 2 Product View The figure serves a...

Page 15: ...ew 1 Product name 2 Serial number 3 Brand name 4 Country of origin 5 Manufacturer s logo 6 CE conformity mark 7 Manufacturer s address website 8 Disposal of used devices 9 Warning sign Observe manual...

Page 16: ...c screws 000036450 M4 screw set for protective earth consisting of 1 M4x8 flat head screw with cross recess ISO 7045 2 safety washers 2 flat washers P500T0002 Technical Note with instructions on unpac...

Page 17: ...terface and display module 3 X E 712 digital piezo controller modular system for up to 6 axes 3 6 X E 725 digital piezo controller for up to 3 axes 3 X E 761 digital piezo controller for up to 3 axes...

Page 18: ...ect metrology and work without contact Neither friction nor hysteresis interferes with the motion which allows excellent linearity values to be achieved in combination with the high position resolutio...

Page 19: ...he P 56x externally by the base body The P 56x is delivered with installed transport lock The following figures serve as examples and can differ from your stage model Figure 4 Exemplary view Stage wit...

Page 20: ...transport lock a Place the P 56x on a surface with the support frame facing downwards b Release the four plastic screws with a screwdriver In the following figure one of the screws is marked with an...

Page 21: ...tors can also stay charged for several hours Touching or short circuiting the contacts in the connector of the P 56x can lead to minor injuries In addition the piezo actuators can be destroyed by an a...

Page 22: ...d by PI for connecting the P 56x to the electronics NOTICE Damage from incorrect mounting Incorrect mounting of the P 56x or incorrectly mounted parts can damage the P 56x Only mount the P 56x and the...

Page 23: ...serve the applicable standards for mounting the protective earth conductor The P 56x is equipped with an M4 hole for fastening the protective earth conductor This hole is located next to the cable exi...

Page 24: ...o the protective earth conductor 1 If necessary fasten a suitable cable lug to the protective earth conductor 2 Fasten the cable lug of the protective earth conductor using the M4 screw on the protect...

Page 25: ...x on surfaces that have the same or similar thermal expansion properties as the P 56x NOTICE Tensile stress on piezo actuator with vertical mounting When the stage is mounted vertically tensile stress...

Page 26: ...tood the General Notes on Installation p 17 Tools and accessories Screws of appropriate size and length see Dimensions p 42 Suitable tools Mounting the stage on a surface 1 Position the stage on an ev...

Page 27: ...xing of loads with uneven contact surface Affixing loads with an uneven contact surface can warp the P 56x Warping reduces the accuracy Only affix loads on the P 56x whose contact surface with the mov...

Page 28: ...he moving platform p 42 Only use screws of the correct length for the respective mounting holes INFORMATION The arrows in the figures see Dimensions p 42 show the positive direction of motion Center o...

Page 29: ...d holes p 42 intended for this purpose and with suitable screws Observe the specified torque range p 43 while doing so Affix the load so that it is centered and that the center of load is on the movin...

Page 30: ......

Page 31: ...arth conductor during operation If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 56x to the protective earth conductor before starting i...

Page 32: ...operate the P 56x with controllers drivers and original accessories from PI Do not exceed the operating voltage range p 40 for which the P 56x is specified Only operate the P 56x when the operating vo...

Page 33: ...the positioning accuracy is reduced after the P 56x the controller an extension cable or an adapter cable has been replaced Perform a recalibration of the axis displacement see controller manual or c...

Page 34: ...and transporting the P 56x and for modifications The P 56x is discharged through the internal discharge resistor of the controller from PI Discharging a P 56x that is connected to the controller In c...

Page 35: ...nical components and piezo actuators Loosened screws cause a loss in positioning accuracy Only loosen screws according to the instructions in this manual Do not open the P 56x 7 2 Packing the P 56x fo...

Page 36: ...ging Transport lock included in delivery consisting of Support frame 4 plastic screws Suitable screwdriver Packing the P 56x 1 Attach the transport lock a Place the support frame on a surface b Place...

Page 37: ...arked with an arrow 2 Pack the stage in the original packaging 7 3 Cleaning the P 56x Prerequisites You have discharged the piezo actuators of the P 56x p 30 You have disconnected the P 56x from the c...

Page 38: ......

Page 39: ...r above or below calibration temperature 21 C to 24 C Perform a zero point adjustment of the sensor see controller manual Reduced positioning accuracy Warping of the base body or the moving platform O...

Page 40: ...ors Observe the assignment of the axes when connecting the stage to the controller This assignment is indicated by labels on the devices The stage starts oscillating or positions inaccurately Servo co...

Page 41: ...stions concerning your system have the following information ready Product codes and serial numbers of all products in the system Firmware version of the controller if present Version of the driver or...

Page 42: ......

Page 43: ...5 0 1 nm typ Closed loop resolution 0 8 1 2 0 2 nm typ Linearity error 0 03 0 03 0 03 0 01 typ Repeatability in X Y Z 2 2 2 2 2 4 2 2 4 2 2 2 nm typ Pitch in X Y 1 2 2 3 rad typ Crosstalk X Y motion i...

Page 44: ...n LEMO The resolution of PI piezo nanopositioning systems is not limited by friction or stiction Value given is noise equivalent motion with E 725 E 712 controller With digital controller Non linearit...

Page 45: ...altitude 2000 m Air pressure 1100 hPa to 0 1 hPa corresponds to roughly 825 Torr to 0 075 Torr Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 rel...

Page 46: ...10 Technical Data 42 Version 1 0 0 PZ248E P 56x Nanopositioners 10 3 Dimensions Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 10 P 56x 3CD and P 56x 3CL...

Page 47: ...Version 1 0 0 43 Figure 11 P 561 3DD 10 4 Torque for Stainless Steel Screws A2 70 Screw Size Minimum Torque Maximum Torque M6 4 Nm 6 Nm M5 2 5 Nm 3 5 Nm M4 1 5 Nm 2 5 Nm M3 0 8 Nm 1 1 Nm M2 5 0 3 Nm...

Page 48: ...signal channel 3 nonmoving part of the capacitive sensor A2 outer conductor GND Shield of Probe sensor signal channel 3 A3 inner conductor Output Probe sensor signal channel 1 nonmoving part of the ca...

Page 49: ...Input Piezo voltage channel 3 20 Input Piezo voltage channel 2 21 Input Piezo voltage channel 1 22 GND Shield of Target sensor signal channel 1 LEMO coaxial connector Only for P 56x 3CL one PZT P and...

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Page 51: ...nternational national and local rules and regulations To meet the manufacturer s product responsibility with regard to this product Physik Instrumente PI GmbH Co KG ensures environmentally correct dis...

Page 52: ......

Page 53: ...he following European directives 2006 95 EC Low Voltage Directive 2004 108 EC EMC Directive 2011 65 EU RoHS Directive The applied standards certifying the conformity are listed below Electromagnetic E...

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