3 Product Description
14
Version: 1.0.0
PZ248E
P-56x Nanopositioners
3.6.2 Flexure Guides
P-56x stages have flexure guides (flexures) for frictionless motion and high guiding
accuracies.
A flexure guide is an element which is free from static and sliding friction. It is based
on the elastic deformation (bending) of a solid (e.g. steel) and does not have any
rolling or sliding parts. Flexure elements have a high stiffness and load capacity.
Flexure guides are maintenance- and wear-free. They are 100 % vacuum compatible,
function in a wide temperature range and do not require any lubricants.
3.6.3 Capacitive Sensors
Capacitive sensors measure the position directly on the moving platform (direct
metrology) and work without contact. Neither friction nor hysteresis interferes with the
motion, which allows excellent linearity values to be achieved in combination with the
high position resolution. In connection with suitable electronics, capacitive sensors
achieve the best resolution, stability and bandwidth.
3.6.4 ID Chip (Only Models With Sub-D Connector)
An ID chip is located in the Sub-D connector of the stage. When the stage is
calibrated at the factory with digital electronics, the calibration data is saved together
with specific product information on the ID chip. When switched on, digital electronics
read the data from the ID chip of the connected stage. Stages whose ID chip contains
the calibration data can therefore be connected to any suitable digital electronics
without a new calibration.
For more information on the ID chip, see the manual of the controller used.
