3 Product Description
10
Version: 1.0.0
PZ248E
P-56x Nanopositioners
Model
Description
P-563.3CD
PIMars XYZ nanopositioning system with large travel range,
300 µm × 300 µm × 300 µm, capacitive sensors, parallel
metrology, Sub-D connector(s)
P-563.3CL
PIMars XYZ nanopositioning system with large travel range,
300 µm × 300 µm × 300 µm, capacitive sensors, parallel
metrology, LEMO connector(s)
3.2 Product View
The figure serves as an example and can differ from your stage model.
Figure 1: Example of product view
1
Moving platform
2
Cable exit
3
Protective earth connection
4
Base body
X, Y, Z
(Positive) directions of motion of the stage
