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Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email [email protected], www.pi.ws

MP107E

M-687.UO XY Stage

User Manual

Version: 1.3.0

Date: 17.03.2022

This document describes the following product:



M-687.UO

XY stage for inverted Olympus microscopes,

100 mm × 75 mm, self-locking, PILine® linear

drives, 0.1 µm resolution

Summary of Contents for M-687.UO

Page 1: ...9 721 4846 0 Fax 49 721 4846 1019 Email info pi ws www pi ws MP107E M 687 UO XY Stage User Manual Version 1 3 0 Date 17 03 2022 This document describes the following product M 687 UO XY stage for inverted Olympus microscopes 100 mm 75 mm self locking PILine linear drives 0 1 µm resolution ...

Page 2: ...PI GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights The use of any text images and drawings is permitted only in part and only when indicating the source Original instructions First printing 17 03 2022 Document number MP107E CBo Version 1 3 0 Subject to change without...

Page 3: ...e Controllers 11 3 5 Accessories 11 3 6 Technical Features 12 3 6 1 Linear Encoder 12 3 6 2 Limit Switches 12 3 6 3 Reference Switch 12 4 Unpacking 13 5 Installation 15 5 1 General Notes on Installing 15 5 2 Connecting the M 687 UO to the Protective Earth Conductor 16 5 3 Mounting the M 687 UO onto a Surface 18 5 4 Mounting a Positioner on the M 687 UO 19 5 5 Inserting and Removing the M 687 AP1 U...

Page 4: ...a 35 10 1 Specifications 35 10 1 1 Data Table 35 10 1 2 Limit Switch Specifications 36 10 1 3 Reference Switch Specifications 36 10 1 4 Maximum Ratings 36 10 2 Ambient Conditions and Classifications 37 10 3 Influence of Downtimes on the Static Holding Force 37 10 4 Dimensions 38 10 5 Pin Assignment 39 11 Old Equipment Disposal 41 12 European Declarations of Conformity 43 ...

Page 5: ...tal understanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual CAUTION Dangerous situation Failure to comply could lead to minor injury Precautionary...

Page 6: ... with sensor evaluation for closed loop operation of positioners e g C 867 controller Amplifier Electronics without sensor evaluation for open loop operation of positioners Load capacity Maximum load capacity in the vertical direction when the M 687 UO is mounted horizontally The contact point of the load is at the center of the motion platform Linear encoder The linear encoder is an incremental s...

Page 7: ... INFORMATION If a manual is missing or problems occur with downloading Contact our customer service department p 33 Downloading Manuals 1 Open the website www pi ws 2 Search the website for the product number e g M 687 or the product family e g PILine 3 Click the corresponding product to open the product detail page 4 Click the Downloads tab The manuals are shown under Documentation Software manua...

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Page 9: ...le or the environment The M 687 UO is only intended for horizontal mounting It is only possible to use the M 687 UO as intended when it is completely mounted and connected The M 687 UO uses PILine ultrasonic piezo linear motors as a drive and must be operated with a suitable controller p 11 2 2 General Safety Instructions The M 687 UO is built according to state of the art technology and recognize...

Page 10: ...e connectors out of the electronics during operation If possible use screws to secure the connectors against being pulled out of the electronics If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the M 687 UO in the case of malfunction or failure of the system If there are touch voltages touching the M 687 UO can result in minor injuries from ele...

Page 11: ...notes If you give the M 687 UO to a third party include this user manual as well as other relevant information provided by the manufacturer Do the work only if the user manual is complete Missing information due to an incomplete user manual can result in minor injury and damage to equipment Install and operate the M 687 UO only after you have read and understood this user manual Personnel qualific...

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Page 13: ...essories 11 Technical Features 12 3 1 Product View Figure 1 M 687 UO product view 1 Lower platform X axis 2 Upper platform Y axis 3 Base body 4 Protective earth connection 5 Connection socket for controller cable Y axis 6 Connection socket for controller cable X axis X Directions of motion of the X axis Y Directions of motion of the Y axis 3 Product Description ...

Page 14: ... website CE conformity mark PILine Brand name Symbol for the protective earth conductor marks the protective earth connector of the M 687 UO p 16 Axis X Connection socket for controller cable X axis Axis Y Connection socket for controller cable Y axis 3 3 Scope of Delivery Product number Quantity Description M 687 UO 1 XY stage for inverted Olympus microscopes 100 mm 75 mm self locking PILine line...

Page 15: ...ture P 541 Z Flat nanopositioner Z stage with large aperture P 545 2R8S PInano XY piezo system clear aperture for microscope slides 200 µm 200 µm piezoresistive sensors with USB digital controller P 545 3R8S PInano XYZ piezo system clear aperture for microscope slides 200 µm 200 µm 200 µm piezoresistive sensors with USB digital controller PD73Z2COW PInano Z piezo scanner system with clear aperture...

Page 16: ...tches Each limit switch sends an overrun signal on a dedicated line to the controller The controller then stops the motion If the controller does not stop the motion in time the XY stage runs into the hard stop Refer to Limit Switch Specifications p 36 for more information 3 6 3 Reference Switch The M 687 UO is equipped with one direction sensing reference switch per axis The switch is located at ...

Page 17: ... UO is always horizontal If the M 687 UO must be brought to a vertical position during installation secure the platforms against slipping 1 Unpack the M 687 UO with care 2 Compare the contents with the scope of delivery according to the contract and the delivery note 3 Inspect the contents for signs of damage If any parts are damaged or missing contact our customer service department p 33 immediat...

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Page 19: ...ouching the contacts in the connection sockets of the M 687 UO or in the connectors of the connected cables could lead to minor injuries from electric shock In addition the piezo actuators could be destroyed by an abrupt contraction Do not open the M 687 UO Do not touch the contacts in the connection sockets of the M 687 UO If an adapter or connecting cable is connected to the M 687 UO do not touc...

Page 20: ... When moving the platform in a power off state manually differences in the holding force may be noticeable across the travel range There are mechanical reasons for fluctuations in the holding force and they have no influence on the function of the XY stage 5 2 Connecting the M 687 UO to the Protective Earth Conductor INFORMATION Pay attention to the applicable standards for connecting the protecti...

Page 21: ...onnected to the controller Tools and accessories Suitable protective earth conductor Cross sectional area of the cable 0 75 mm2 M4 screw set supplied for connecting the protective earth conductor p 10 Suitable screwdriver Connecting the M 687 UO to the Protective Earth Conductor 1 If necessary attach a suitable cable lug to the protective earth conductor 2 Use the M4 screw together with the flat a...

Page 22: ... 687 UO onto a flat surface The recommended flatness of the surface is 5 µm For applications with large temperature fluctuations Only fix the M 687 UO to surfaces that have the same or similar thermal expansion properties as the M 687 UO e g surfaces made of aluminum INFORMATION The M 687 UO s directions of motion are indicated in the product view p 9 Figure 3 M 687 UO Mounting holes in the base b...

Page 23: ...Impermissibly high load on the XY stage An impermissibly high load impairs the motion of the platforms and can damage the XY stage For mounting type and mass of the load pay attention to the maximum permissible forces that according to the specification p 35 are allowed to act on the platforms NOTICE Excessively long screws The M 687 UO can be damaged by excessively long screws Pay attention to th...

Page 24: ...6x30 P 541 2 P 542 2 M6x16 P 541 Z M6x16 P 545 2R8S M4x20 P 545 3R8S M4x20 PD73Z2COW M4x12 PD73Z2ROW M4x12 P 737 1SL M2 5x10 P 737 2SL M2 5x10 Suitable tool for tightening the screws Mounting a positioner on the M 687 UO 1 Select the mounting position so that the threaded holes in the upper platform refer to figure above can be used for fixing the positioner 2 Fix the positioner to the threaded ho...

Page 25: ... Align the universal holder so that the red dot on the holder points in the direction of the clip spring of the aperture refer to figure above 2 On the side of the clip spring place the short edge of the universal holder at a flat angle in the middle of the aperture so that it makes contact on two sides 3 Slowly slide the universal holder towards the clip spring until it reaches the edge and the c...

Page 26: ... UO to the protective earth conductor p 16 Tools and accessories Two U 600 AMD adapter cables p 10 Connecting the M 687 UO to the controller 1 Connect the MDR connector of the first cable to the Axis X socket of the M 687 UO 2 Connect the D sub connector m on the other end of the cable to the Axis 1 socket of the controller 3 Connect the MDR connector of the second cable to the Axis Y socket of th...

Page 27: ...y e g in the case of modifications reconnect the M 687 UO to the protective earth conductor before restarting NOTICE Destruction of the piezo motor due to electric flashovers Using the M 687 UO in environments that increase the electrical conductivity could lead to the destruction of the piezo motor by electric flashovers Electric flashovers can be caused by moisture high humidity liquids and cond...

Page 28: ...ironment or from a warm into a cold environment Keep the M 687 UO free of condensation NOTICE Unintentional motion The M 687 UO may move unintentionally when connecting it to the controller Faulty software and incorrect operation of the software may also cause unintended movements Do not place any objects in areas where they can be caught by moving parts Before connecting the M 687 UO check whethe...

Page 29: ...to the velocity acceleration deceleration and load in small steps only Do not deactivate the limit switches in the software Test the function of the limit switches at low velocities only Stop motion immediately if the limit switches malfunction INFORMATION Although the M 687 UO operates quietly in theory noise levels of up to 50 dB A are possible during operation The ultrasonic drive of the M 687 ...

Page 30: ...erm I term D term acceleration velocity refer to the controller manual Save the new parameter values to a positioner database on the PC or to the nonvolatile memory of the controller for future use refer to the controller manual and the PIMikroMove manual INFORMATION The X and Y axes of the M 687 UO XY stage have different travel ranges Therefore for each axis a separate positioner type with speci...

Page 31: ...d All connections on the controller have been made refer to the controller manual Starting and operating the M 687 UO with the C 867 controller Operate one axis of the M 687 UO refer to controller manual and repeat the sequence for the second axis Starting and operating comprises the following steps Selecting the positioner type Referencing the axis Commanding initial motion in closed loop operati...

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Page 33: ... to distribute the existing lubricant on the guides of the M 687 UO To evenly distribute the existing lubricant on the stage guides do a maintenance run across the entire travel range after 500 hours of operation or at least after 1 year If you move the M 687 UO over a small travel range 20 of the entire travel range in continuous industrial operation do a maintenance run across the entire travel ...

Page 34: ...7E M 687 UO XY Stage 7 3 Cleaning the M 687 UO Requirements You have disconnected the M 687 UO from the controller Cleaning the M 687 UO If necessary clean the M 687 UO surface using a cloth dampened with a mild cleanser or disinfectant ...

Page 35: ...reased wear Warped base body Mount the M 687 UO onto a flat surface The recommended flatness of the surface is 5 µm For applications with large temperature fluctuations Only mount the M 687 UO on surfaces that have the same or similar thermal expansion properties as the M 687 UO e g surfaces made of aluminum Reduced accuracy Axis does not reach the commanded position The values of the travel range...

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Page 37: ...ion Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if applicable If possible Take photographs or make videos of your system that can be sent to our customer service department if requested The latest versions of the user manuals are available for download p 3 on...

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Page 39: ...ssignment 39 10 1 Specifications 10 1 1 Data Table M 687 UO Unit Tolerance XY Stage for Inverted Olympus Microscopes Active axes X Y Motion and positioning Travel range 100 mm 75 mm Integrated sensor Linear encoder Sensor resolution 0 1 µm Pitch yaw 300 µrad Typ Velocity 120 mm s Max Reference switch Optical 1 µm repeatability Limit switch Hall effect Mechanical properties Load capacity 25 N Max D...

Page 40: ...limit switch is passed the signal level changes Normal motor operation low 0 V Limit switch reached high 5 V 10 1 3 Reference Switch Specifications Type Optical sensor Supply voltage 5 V GND supply via the motor socket Signal output TTL level Signal logic Direction sensing by means of different signal levels on the left and right hand side of the reference switch The signal level changes from 0 to...

Page 41: ...Pa Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C Operating temperature 20 C to 40 C Storage temperature 20 C to 75 C Transport temperature 20 C to 75 C Overvoltage category II Protection class I Degree of pollution 1 Degree of protection according to IEC 60529 IP20 10 3 Influence of Downtimes on the Static Holding For...

Page 42: ...10 Technical Data 38 Version 1 3 0 MP107E M 687 UO XY Stage 10 4 Dimensions Figure 8 M 687 UO XY stage dimensions in mm spacer Note that a comma is used in the drawings instead of a decimal point ...

Page 43: ... Output Negative end limit switch active high A4 REFSWITCH Output Reference switch TTL positive A5 NC Not connected A6 VDD Input 5 V A7 USM_P1 Input Piezo voltage ground B1 USM_P2 Input Piezo 71 VAC RMS B2 USM_P3 Input Piezo 71 VAC RMS B3 ENCA Output Encoder channel A RS 422 B4 ENCA Output Encoder channel A inverted RS 422 B5 ENCB Output Encoder channel B RS 422 B6 ENCB Output Encoder channel B in...

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Page 45: ...tional national and local rules and regulations In order to fulfill its responsibility as the product manufacturer Physik Instrumente PI GmbH Co KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge Any old PI equipment can be sent free of charge to the following address Physik Instrumente PI GmbH Co KG Auf der Roeme...

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Page 47: ...of conformity were issued according to the following European statutory requirements Low Voltage Directive EMC Directive RoHS Directive The standards applied for certifying conformity are listed below Safety Low Voltage Directive EN 61010 1 EMC EN 61326 1 RoHS EN IEC 63000 12 European Declarations of Conformity ...

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