User Manual
L306T0002, applies to L-306.011100 / 011112 / 013112
MMa, 2019-AUG-20
PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Page 19 / 25
Phone +49 7634 5057-0, Fax +49 7634 5057-99, Email
Specifications
Technical Data
L-306.011100 L-306.011112 L-306.013112 Unit
Tolerance
Motion and positioning
Travel range
13
mm
Sensor resolution
-
5
50
nm
Design resolution
2.5
0.005
0.05
nm
Minimum incremental motion 0.5
0.1
0.1
µm
typ.
Unidirectional repeatability
0.2
0.1
0.1
µm
typ.
Bidirectional repeatability
±2
±0.5
±0.5
µm
typ.
Pitch
±175
µrad
typ.
Yaw
±150
µrad
typ.
Straightness / flatness
±3
µm
typ.
Velocity
5
mm/s
max.
Reference and limit switches
Optical
Mechanical properties
Guide type
Crossed roller guide, anti-creep system
Drive screw type
Ball screw
Drive screw pitch
0.5
mm
Push / pull force
20
N
max.
Holding force, power off
20
N
typ.
Permissible lateral force
10
N
max.
Load capacity
20
N
max.
Permissible torque in θ
X
, θ
Y
1
Nm
max.
Permissible torque in θ
Z
2
Nm
max.
Drive properties
Motor type
2-phase stepper motor
DC motor
Operating voltage
48
V
max.
Power consumption
5
7
W
max.
