User Manual
E727T0005, valid for E-727
BRO, 2019-06-28
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Page 29 / 240
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position values (see "Using the Analog Input" (p. 85) for more information and
examples).
If the connected mechanics has an ID-chip, the coefficients will be read in from the
ID-chip (see "ID-Chip Support / Stage Replacement" (p. 131) for more information).
The TNS? command reports the result after the linearization for the electronics (normalized value,
dimensionless), while the TSP? command reports the result after the linearization for the
mechanics (scaled value, the unit is µm).
Allocation of input signal channels to axes
Multiple sensors can be used to monitor the position of an axis, especially with rotation axes. The
internal sensors in the mechanics are active by default, while additional, external sensors can
optionally be connected to the analog input lines of E-727.xxxA or .xxxAx models. The axis
positions are calculated from the position values of the input signal channels using the input
matrix. The number of rows and columns of the input matrix depends on the E-727 model. The
example below shows the matrix for an E-727.3CDA model which controls 3 axes and has 3
channels for internal sensors and 4 additional analog input lines (the last four input signal
channels):
∗
=
7
6
5
4
3
2
1
37
36
35
34
33
32
31
27
26
25
24
23
22
21
17
16
15
14
13
12
11
3
2
1
InputCh
InputCh
InputCh
InputCh
InputCh
InputCh
InputCh
a
a
a
a
a
a
a
a
a
a
a
a
a
a
a
a
a
a
a
a
a
Axis
Axis
Axis
In equation form:
Axis
1
= a
11
InputCh
1
+ a
12
InputCh
2
+ a
13
InputCh
3
+ a
14
InputCh
4
+ a
15
InputCh
5
+ a
16
InputCh
6
+ a
17
InputCh
7
Axis
2
= a
21
InputCh
1
+ a
22
InputCh
2
+ a
23
InputCh
3
+ a
24
InputCh
4
+ a
25
InputCh
5
+ a
26
InputCh
6
+ a
27
InputCh
7
Axis
3
= a
31
InputCh
1
+ a
32
InputCh
2
+ a
33
InputCh
3
+ a
34
InputCh
4
+ a
35
InputCh
5
+ a
36
InputCh
6
+ a
37
InputCh
7
The matrix coefficients are given by the
Position From Sensor n
parameters (
n
depends on the
number of input signal channels present in the E-727). With an E-727.3CDA, for example, the
following parameters are used (with i = 1 to 3 for the three axes of the system, i.e. each parameter
has a different value for each of the logical axes):
a
i1
=
Position From Sensor 1
, parameter ID 0x07000500
a
i2
=
Position From Sensor 2
, parameter ID 0x07000501
a
i3
=
Position From Sensor 3
, parameter ID 0x07000502
These coefficients are for the internal sensors in the mechanics (socket for piezo
stages).
a
i4
=
Position From Sensor 4
, parameter ID 0x07000503
a
i5
=
Position From Sensor 5
, parameter ID 0x07000504
a
i6
=
Position From Sensor 6
, parameter ID 0x07000505
a
i7
=
Position From Sensor 7
, parameter ID 0x07000506
These coefficients are for the analog input lines (
Analog I/O
socket).