User Manual
A620D0001 Rev 1.2
30-July-2019
Page 1 of 32
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]
A-62x Series Rotary Air Bearing Stage
PIglide RM, Direct-drive Torque Motor Driven with Encoder Feedback
This document describes the A-62x.xxxxx Series of Rotary Air Bearing Motorized Stages.