PI A-311.F Series User Manual Download

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User Manual

A311D0002 Rev 2.0

11-Nov-2021

Page 1 of 26

PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: [email protected]

A-311.F & G Series

PIglide Compact Planar XY Air Bearing Stage

Linear Motor Driven with Encoder Feedback

Summary of Contents for A-311.F Series

Page 1: ...v 2021 Page 1 of 26 PI Physik Instrumente L P 16 Albert Street Auburn MA 01501 Tel 508 832 3456 Fax 508 832 0506 Email air pi usa us A 311 F G Series PIglide Compact Planar XY Air Bearing Stage Linear...

Page 2: ...atent applications for the technology field Magnetic Direct Drives PIMag WO212146709A2 DE102012207082A1 2021 PI Physik Instrumente L P The text photographs and drawings in this manual are protected by...

Page 3: ...______________________________________________________ 10 3 4 Scope of Delivery _________________________________________________________________ 10 3 5 Accessories Cables ____________________________...

Page 4: ...____________________ 23 10 3 Encoder Specifications ___________________________________________________________ 23 10 4 Ambient Conditions _____________________________________________________________...

Page 5: ...s well as motion control concepts and applicable safety procedures 1 2 Symbols and Typographic Conventions The following symbols and markings are used in this User Manual Symbol Meaning If not avoided...

Page 6: ...e the A 311 for its intended purpose and only use it if it is in a good working order Read the user manual Immediately eliminate any faults and malfunctions that are likely to affect safety The operat...

Page 7: ...eration in conditions other than those specified can cause damage to the equipment The stage must be mounted securely Improper mounting can result in injury and damage to the equipment Use care when m...

Page 8: ...anual Missing information due to an incomplete user manual can result in minor injury and property damage Only install and operate the A 311 after having read and understood this user manual Personnel...

Page 9: ...The A 311 incorporates opposing lateral preload and magnetic vertical preload The brushless linear motor uses an ironless motor coil which means there is zero cogging and no attractive forces resultin...

Page 10: ...ebsite 7 Manufacturer s logo 8 CE mark 3 4 Scope of Delivery Item ID Component A 311 xxx XY stage according to the order Stage Mounting Screws M6 x 55 SHCS Transport lock kit and hardware A311D0002 Us...

Page 11: ...A 311 is unsuitable for vertical orientations The planar design of the stage allows motion in both X and Y directions orthogonal to each other 4 2 Linear Motor The A 311 series stage features three b...

Page 12: ...e mounted in such a way as to block the product label it is recommended to record the stage serial number for future reference The A 311 stage must always be transported and shipped with the shipping...

Page 13: ...is mounted to a non flat surface the stage can be distorted as the mounting screws are tightened This distortion will decrease the overall accuracy of the stage Adjustments to the mounting surface mu...

Page 14: ...ts such as loose screws Attracted objects can damage the stage Make sure mounting screws and tools are not pulled into the motor magnet track 7 Torque the mounting screws begin from the center out for...

Page 15: ...preload the air bearing See Section 10 1 Basic Specifications for detailed vacuum supply requirements Turning off the air supply when not in use When the stage is not in use the air supply may be tur...

Page 16: ...ize the possibility of bodily injury or death from electric shock in the case of malfunction or failure of the system make sure a protective earth conductor is properly connected The A 311 has an M4 t...

Page 17: ...d bodily injury or death disconnect all electrical power prior to making any electrical connections To minimize the possibility of electrical shock and bodily injury or death when any electrical circu...

Page 18: ...has been improperly or incompletely installed the stage the payload and the environment can be damaged during operation The stage table should never be moved without the air supply turned on Moving th...

Page 19: ...u have modified the servo control parameter settings see the manual of the controller Note that the servo tuning values may need to be adjusted if the payload mass or size changes 8 Maintenance Other...

Page 20: ...using a 4mm Allen wrench The bolts should be tight enough to prevent any motion of the bracket but do not require a specific bolt torque The stage is now secured and can be safely moved If the stage n...

Page 21: ...usa us Address 16 Albert Street Auburn MA 01501 USA Tel 508 832 3456 Fax 508 832 0506 If you have questions concerning your system have the following information ready Product codes and serial numbers...

Page 22: ...ower Y Axis 12 5 kg includes upper axis 15 kg includes upper axis Cabling Moving drag chains both axes Operating Pressure 5 60 to 70 psig 415 to 485 kPa Air Consumption 2 SCFM 56 SLPM Air Quality Clea...

Page 23: ...ode B Type Absolute Resolution 1 nm Output Signal BiSS C 32 bit serial Power Input 5 VC 250mA 10 4 Ambient Conditions Area of use For indoor use only Vacuum Operation This product is not compatible wi...

Page 24: ...11D0002 Rev 2 0 11 Nov 2021 Page 24 of 26 PI Physik Instrumente L P 16 Albert Street Auburn MA 01501 Tel 508 832 3456 Fax 508 832 0506 Email air pi usa us 10 5 Dimensions Figure 7 A 311 F G Series Sta...

Page 25: ...age IO Panel Pins are assumed to be N C if not shown below Motor Connector Y Left Y Right X Type DB3W3M Pin Function Description A1 PHA Motor phase A A2 PHB Motor phase B A3 PHC Motor phase C Encoder...

Page 26: ...ectrical operating device The operator is responsible for a standards compliant integration of the electrical device into the overall system 12 Old Equipment Disposal In accordance with EU law electri...

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