Technical parameters
Technical parameters
Name Content
Measuring
range
Z Axis(Vertical)
160
μ
m
X Axis(Horizontal)
17.5mm
Resolution
Z Axis(Vertical)
0.01
μ
m/
±
20
μ
m
0.02
μ
m/
±
40
μ
m
Measurement
item
Parameters
Ra, Rq, Rz, Rt, Rp, Rv, RS, RSm,Rz(JIS)
Ry(JIS)
RSk
、
R3z
、
Rmax
、
Rpc
、
Rmr
；
Standard
ISO, ANSI, DIN, JIS
Graphic
Roughness profile, Material ratio curve, Direct profile
Filter
RC,PC-RC, Gauss, D-P
Sampling length (lr)
0.25,0.8,2.5mm
Assessment length (ln)
L
n=
l
r
×
n n=1~5
Pickup
principle Differential
inductance
Stylus Natural
Diamond,
90
cone angle, 5
μ
m tip radius
Force <4mN
Skid
Ruby, Longitudinal radius 40mm
Traversing speed
l
r=0.25, Vt=0.135mm/s
l
r=0.8, Vt=0. 5mm/s
l
r=2. 5, Vt=1mm/s
Return Vt=1mm/s
Accuracy
Less than or equal to
±10%
Repeatability
Less than or equal to
6%
Power supply
Built-in Lithium ion battery
,
AC adapter
8.4V,800mA
L×W×H
119×47×65mm
Weight
Approx.
380g