5 Installation
5.1 Establishing vacuum connection
DANGER
Risk to life due to electric shock
An improperly earthed product is potentially fatal in the event of a fault.
► Connect the product galvanically with the earthed vacuum chamber.
► Ensure that the connection complies with the requirements of a protective bonding according to
EN 61010. (CF and VCR connections comply with this requirement.)
► Use electrically conductive centering rings and circlips for KF connections.
WARNING
Risk of injury resulting from overpressure in the vacuum system
Opening tensioning pieces with an overpressure
> 1000 hPa
in the vacuum system can lead to inju-
ries as a result of flying parts, and escaping process medium could prove harmful to health.
Elastomer seals in KF connections (e.g. O-rings) are not resistant to pressures
> 2500 hPa
. This
could prove harmful to health due to escaping process medium.
► Do not open any tensioning pieces when overpressure is prevalent in the vacuum system.
► Use suitable tensioning pieces for overpressure.
► Use tensioning pieces which can only be opened and closed using a tool (e.g. tightening strap-
circlip).
► Use sealing rings with an outer centering ring.
NOTICE
Impairment from contamination and damage
Touching the devices or components with bare hands increases the desorption rate and leads to in-
correct measurements. Dirt (e.g. dust, fingerprints, etc.) and damage impair the function.
► When working on high or ultra high vacuum systems, always wear clean, lint-free and powder-
free laboratory gloves.
► Only use clean tools.
► Make sure that the connection flanges are free of grease.
► Remove protective caps and protective covers from flanges and connections only when necessa-
ry.
► Carry out all work in a well lit area.
Prerequisites
● Appropriate ambient conditions
● Operating temperature within permissible range
● Adequate room available for electrical connection (e.g. permissible bending radii for cables)
Installation
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