7. Tighten the screws.
– Tightening torque:
0.15 Nm
8. Make sure that the spring washer and the fixing screw have good contact.
– Do not bolt the spring washer and the fixing screw together.
9. Measure the resistance of each filament.
Setting parameters in the operating software to 0 (zero)
► Set the pressure cut-off meter of the ion source to 0 (zero) in uCon with the command U204.
– Alternatively, enter "/mmsp/sensorIonSource/tPTripCount/set?0" in the web browser and con-
firm with Enter.
9.4.2 Replacing the filament unit of the crossbeam ion source
Renew filaments of both filament holders
Pfeiffer Vacuum recommends always renewing both filament holders with filaments.
Prerequisite
● PrismaPro deactivated
Required tools
● Socket key,
WAF 3.2
● Flat screwdriver,
3 mm
● Torque wrench
● Flat pliers
Required aid
● Mounting aid for the analyzer
Required spare parts
● Filament unit for crossbeam ion source with tungsten filaments or Y
2
O
3
-coated iridium filaments
● If necessary, set of parts PT 163 543 for the replacement of screws, nuts or clamps
1
3
4
11
8
7
5
6
9
10
2
Fig. 25:
Filament unit of the crossbeam ion source
1 Clamp (4×)
7
Stud bolt (2×)
2 Nut (4×)
(rectangular)
8
Wehnelt plate (2×)
3 Screw (4×)
(M1.6×5, slot, stainless steel, gold-plated)
9
Filament (2×)
4 Filament holder with filament (2×)
10
Ceramic insulator (2×)
5 Formation area
11
Nut (2×)
(M1.6, hexagon, stainless steel)
6 Lateral openings of the formation area
Maintenance
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