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About this manual

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1

About this manual

1.1

Validity

This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning 
of  the designated product and provides the most important information for safe use of 
the unit. The description follows applicable EU guidelines. All information provided in this 
operating manual refers to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from 
www.pfeiffer-vacuum.com. 

1.2

Conventions

Safety instructions

The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk 
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this 
document, the following hazard levels and information are considered:

DANGER

Imminent danger

Indicates an imminent hazardous situation that will result in death or serious injury.

WARNING

Possibly imminent danger

Indicates an imminent hazardous situation that can result in death or serious injury.

CAUTION

Possibly imminent danger

Indicates an imminent hazardous situation that can result in minor or moderate injury.

NOTICE

Command or note

Command to perform an action or information about properties, the disregarding of 
which may result in damage to the product.

Summary of Contents for OME 40 C

Page 1: ...PD 0053 BEN D 1701 OPERATING INSTRUCTIONS EN Translation of the original instructions OME 40 M MR OME 40 C CR Oil Mist Eliminator ...

Page 2: ...embly 8 5 2 Installing the operating fluid return line 9 5 3 Installing the operating fluid return line 10 5 4 Installing the saturation indicator optically electrical option 12 6 Operation 13 7 Maintenance 14 7 1 Draining the operating fluid 14 7 2 Changing the filter element 16 7 3 Cleaning the operating fluid return line 18 8 Service 19 9 Accessories 19 10 Technical data and dimensions 20 10 1 ...

Page 3: ... The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk evaluations and hazard analyses and are oriented on international certification stan dards as specified by UL CSA ANSI Z 535 SEMI S1 ISO 3864 and DIN 4844 In this document the following hazard levels and information are considered DANGER Imminent danger Indicates an imminent hazardous situation that will resu...

Page 4: ...oughout in all illustrations Vacuum flange Exhaust flange Connection flange OME Prohibition of an action to avoid any risk of accidents the disregarding of which may result in serious accidents Warning of a displayed source of danger in connection with operation of the unit or equipment Command to perform an action or task associated with a source of dan ger the disregarding of which may result in...

Page 5: ...ping speed 2 3 Improper use Improper use will cause all claims for liability and warranties to be forfeited Improper use is defined as usage for purposes deviating from those mentioned above especially connection to pumps or units which are not suitable for this purpose according to their operating instructions connection to units which have exposed voltage carrying parts use of accessories or spa...

Page 6: ... ing in the final vacuum range of 800 hPa intake pressure at 1000 hPa air pressure Moreover its operation is not affected by rotational speed gas ballast application or built up exhaust side pressure During dynamic pump down cycles such as load lock applica tions involving small volumes extended pump down times are to be expected for intake pressures 5 10 2 hPa Type Versions Characteristics OME 40...

Page 7: ... be viewed through a sight glass and drained via a drain screw To return the filtered operating fluid from the OME into the pump without interrupting the pump operation an operating fluid return optional can be used Fig 1 Duo 35 65 with oil mist filter OME 40 MR Operating fluid return line option If the operating fluid accumulated in the OME reaches a specified level a float valve opens and the op...

Page 8: ... is created in the system then a device for draining condensation water must be provided at the lowest point Fig 2 Assembling the OME WARNING Poisonous substances exit from the exhaust There is a poisoning hazard from discharged gases or vapors that can be hazardous and or polluting during use Install and run the exhaust line so that overpressure cannot build up inside it Follow the vacuum pump in...

Page 9: ... 27 it serves as a vibration damper Check the pump s ultimate pressure to ensure a leakproof assembly of the operating fluid return line compare the measurement result with the previously determined ultimate pressure Fill in additional operating fluid in OME in order to ensure the return of operating fluid NOTICE Make sure that the return for the operating fluid is working properly The operating f...

Page 10: ... able to move slightly Replace cover 2 being careful with flat seal 3 Unscrew and remove locking screw 142 on the support Screw reducing piece 25 with O ring 63 into connection 4 on the pump support while ensuring that the sealing surfaces are clean Fit operating fluid return line 27 onto the two reducing pieces using hollow screws 28 being careful with O rings 67 Notice Do not remove the spiral h...

Page 11: ... 45 35 36 48 25 28 63 63 67 67 25 28 63 28 67 3 2 Cover 3 Flat seal 4 Connection operating fluid return line 14 Filter element 25 Reducing piece 27 Operating fluid return line 28 Hollow screw 35 Floater 35 1 Floating support 36 Clamping plate 37 Sealing nipple 38 Cylinder bolt 45 Screws 48 Screw 63 O ring 67 O ring 100 Casing 142 Locking screw ...

Page 12: ...o O ring 66 Tighten screw 49 to 3 Nm Create electrical connection Properties Abrupt gas throughput with a saturated filter element can temporarily move the indicator to the red range or trigger close the switch contact Note the following If a high gas throughput is required by the process temporarily suppress the indicator signal if necessary The red indicating range starts with a back pressure of...

Page 13: ...s the pump s final vacuum Drain operating fluid built up with condensate in a time manner NOTICE Risk of the filter elements becoming blocked with resin When pumping gases and vapors with a tendency towards polymerization the OME fil ter elements can become resinified Observe the corresponding safety devices such as the saturation indicator or pres sure relief valve NOTICE Make sure that the retur...

Page 14: ...uid drain screw 55 pay attention to O ring Dispose of condensate according to the respectively valid legal requirements NOTICE Disclaimer of liability Pfeiffer Vacuum accepts no liability for personal injury or material damage losses or op erating malfunctions due to improperly performed maintenance The liability and war ranty entitlement expires WARNING Operating fluid may contain toxic substance...

Page 15: ...ating fluid return to the pump NOTICE Make sure that the return for the operating fluid is working properly The operating fluid can only be sucked out and returned when there is a minimum about of operating fluid in the oil mist eliminator If necessary top up with operating fluid in order to ensure the return of operating fluid at the start of the evacuation phase Pour the operating fluid slowly i...

Page 16: ...ials that damage health In the case of contamination carry out appropriate safety precautions in order to pre vent danger to health through dangerous substances Decontaminate affected parts before carrying out maintenance work DANGER Danger to health by hazardous substances during maintenance or installation Depending on the process vacuum pumps components or operating fluids can be con taminated ...

Page 17: ...ements in the C version can be cleaned the elements in the standard version must be replaced The success of the cleaning process depends on the process medium being used and should be tested by the user for the specific situation Clean the filter insert in a solvent bath Use blasts of compressed air to expel the cleaning agent from the filter element and then dry them Assembling Assembling is carr...

Page 18: ...When assembling lightly oil sealing nipple 37 and ensure the correct seating in the housing 2 Clean all parts and inspect for wear Assembling is carried out in reverse order Check the pump s ultimate pressure to ensure a leakproof assembly of the operating fluid return line compare the measurement result with the previously determined ultimate pressure Fill in additional operating fluid in OME in ...

Page 19: ...ackaging Sending of contaminated pumps or devices No units will be accepted if they are contaminated with micro biological explosive or ra dioactive substances Hazardous substances are substances and compounds in ac cordance with the hazardous goods directive current version If pumps are contaminat ed or the declaration on contamination is missing Pfeiffer Vacuum performs decontamination at the sh...

Page 20: ...n 98 98 Flange in DN 40 flange DN 40 flange Flange out DN 40 ISO KF DN 40 ISO KF Pressure max absolute 1500 hPa 1500 hPa Exhaust pressure max Atmosphere Atmosphere Leak rate 1 10 4 Pa m3 s 1 10 4 Pa m3 s For Duo 35 65 Duo 35 65 M Duo 35 65 C Duo 35 65 MC For pumping speed 35 70 m3 h 35 70 m3 h Capacity 0 7 l 0 7 l Weight 11 kg 11 kg 356 350 382 142 298 322 46 160 30 341 ...

Page 21: ...01 T Standard 3 12 14 65 OME 40 C CR PK E27 002 T C version 3 12 14 65 Overhaul kit OME 40 M PK E27 003 T Standard 3 9 12 13 14 60 62 63 64 65 66 OME 40 MR PK E27 004 T Standard with return line 3 9 12 13 14 37 60 61 62 63 64 65 66 67 OME 40 C PK E27 005 T C version 3 9 12 13 14 60 62 63 64 65 66 OME 40 CR PK E27 006 T C version with return line 3 9 12 13 14 37 60 61 62 63 64 65 66 67 Saturation i...

Page 22: ...e buffer 11 Pressure piece 12 Seal 13 Sight glass 14 Filter element 15 Saturation indicator 24 Interchangeable flange 25 Reducing piece 27 Operating fluid return line 28 Hollow screw 35 Float valve 37 Sealing nipple 45 Screws 46 Screw 47 Screws 49 Screw 51 Nut 52 Washer 54 Screw plug 55 Operating fluid drain screw 57 Spring washer 60 O ring 61 O ring previous version not shown in the figure 62 O r...

Page 23: ... 23 12 Disposal Products or parts thereof mechanical and electrical components operating fluids etc may cause environmental burden Safely dispose of the materials according to the locally applicable regulations ...

Page 24: ...e are the only supplier of vacuum technology that provides a complete product portfolio COMPETENCE IN THEORY AND PRACTICE Benefit from our know how and our portfolio of training opportunities We support you with your plant layout and provide first class on site service worldwide Are you looking for a perfect vacuum solution Please contact us Pfeiffer Vacuum GmbH Headquarters Germany T 49 6441 802 ...

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