6.5 Flushing suction chamber
NOTICE
Property damage from impermissibly high pressure build-up in the suction chamber
Exceeding the specified flushing quantities damages the vacuum pump.
► Observe the maximum permissible flushing quantities at max. 3000 hPa.
► Fully purge all supplied fluid.
► Observe the vapor compatibility of the downstream vacuum pumps.
NOTICE
Property damage from incorrect cleaning procedure
Flushing fluid and process media that enters the bearing and oil chambers will stick.
► During the cleaning processes, always protect all bearings with sealing gas in order to prevent a
contamination of the lubricant and bearing chambers.
If the extracted medium polymerizes or becomes deposited in the suction chamber, a continuous or dis-
continuous flushing of the suction chamber can be performed during operation.
Procedure
► Choose a suitable spray lance from the Pfeiffer Vacuum accessories range and follow the recom-
mended cleaning procedure, as specified in the lance’s operating instructions.
You can find this document in the
Pfeiffer Vacuum Download Center
.
6.6 Switching off and venting
WARNING
Risk of crushing on rotating parts when reaching into the open flange
The pistons continue to run in the vacuum after switching off the motor, and can trap fingers and
hands within their reach.
► Wait until the vacuum pump comes to a complete standstill.
► Secure the vacuum pump against re-start.
NOTICE
Property damage from impermissibly high sealing gas pressure
Excessive sealing gas pressure leads to damage to the seals after switching on the vacuum pump.
► Make sure that the sealing gas pressure inside the pump does not exceed 1200 hPa.
► Stop the sealing gas supply immediately after switching off the vacuum pump.
Procedure with clean processes
You can switch off the vacuum pump in every pressure range, between atmospheric pressure and ulti-
mate pressure directly after the process end.
1. Close the shut-off valve in the vacuum line and disconnect the vacuum pump from the process.
2. Switch off the vacuum pump.
3. Vent the vacuum pump via the intake side.
4. Make sure that you do not vent the vacuum chambers through the vacuum pump.
5. Switch off the process- and pump-specific media supply (e.g. the sealing gas supply).
Procedure with contaminated medium
With media that heavily contaminate the suction chamber, flush the suction chamber with air, nitrogen
or any other suitable flushing medium at the end of the process.
1. Close the shut-off valve in the vacuum line and disconnect the vacuum pump from the process.
2. At the end of the process, continue to operate the vacuum pump with flushing gas supply at the
vacuum flange for another approx. 20 to 40 minutes.
3. Then stop the flushing gas supply.
4. Switch off the vacuum pump.
Operation
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