Pfeiffer Vacuum HENA 401, Operating Instructions Manual

Page: 60 / 70

14 Technical data and dimensions
14.1 General
Basis for the technical data of Pfeiffer Vacuum rotary vane pumps:
● Specifications according to PNEUROP committee PN5
● ISO 21360-1: 2016: “Vacuum technology - Standard methods for measuring vacuum-pump per-
formance - Part 1: General description”
● Leak test to ascertain the integral leakage rate according to EN 1779: 1999 technique A1; with
20 % helium concentration, 10 s measurement duration
● Sound pressure level according to ISO 3744, class 2
mbar bar Pa hPa kPa Torr | mm Hg
mbar 1
1 · 10
-3 100 1 0.1 0.75
bar 1000 1
1 · 10 5
1000 100 750
Pa 0.01
1 · 10
-5 1 0.01
1 · 10
-3
7.5 · 10
-3
hPa 1
1 · 10 -3
100 1 0.1 0.75
kPa 10 0.01 1000 10 1 7.5
Torr | mm Hg 1.33
1.33 · 10 -3
133.32 1.33 0.133 1
1 Pa = 1 N/m
2
Tbl. 16: Conversion table: Pressure units
mbar l/s Pa m 3 /s sccm Torr l/s atm cm 3 /s
mbar l/s 1 0.1 59.2 0.75 0.987
Pa m 3 /s
10 1 592 7.5 9.87
sccm 1.69 · 10 -2 1.69 · 10 -3 1 1.27 · 10 -2 1.67 · 10 -2
Torr l/s 1.33 0.133 78.9 1 1.32
atm cm
3
/s
1.01 0.101 59.8 0.76 1
Tbl. 17: Conversion table: Units for gas throughput
14.2 Technical data
Classification Hena 401 Hena 401 Hena 401 Hena 401 Hena 401
Part number PK D03 500 PK D04 171 111 PK D04 171 112 PK D04 171
121
PK D04 171
122
Nominal pumping speed
at 50 Hz
400 m³/h 410 m³/h 410 m³/h 410 m³/h 410 m³/h
Nominal pumping speed
at 60 Hz
480 m³/h 480 m³/h 480 m³/h 480 m³/h 480 m³/h
Final pressure with gas
ballast
≤ 7 · 10 -1 hPa ≤ 1.5 hPa ≤ 5 · 10 -1 hPa ≤ 1.5 hPa ≤ 5 · 10 -1 hPa
Final pressure without gas
ballast
≤ 3 · 10 -1 hPa ≤ 5 · 10 -1 hPa ≤ 1 · 10 -1 hPa ≤ 5 · 10 -1 hPa ≤ 1 · 10 -1 hPa
Continuous inlet pressure,
max.
800 hPa 800 hPa 800 hPa 800 hPa 800 hPa
Leak rate safety valve
≤ 8 · 10 -3 Pa
m³/s
≤ 8 · 10 -3 Pa
m³/s
≤ 8 · 10 -3 Pa
m³/s
≤ 8 · 10 -3 Pa
m³/s
≤ 8 · 10 -3 Pa
m³/s
Exhaust pressure, max. Atmospheric
pressure
Atmospheric
pressure
Atmospheric
pressure
Atmospheric
pressure
Atmospheric
pressure
Exhaust pressure, min. Atmospheric
pressure
Atmospheric
pressure
Atmospheric
pressure
Atmospheric
pressure
Atmospheric
pressure
Water vapor capacity 50
Hz
9000 g/h 9000 g/h 9000 g/h 9000 g/h 9000 g/h
Technical data and dimensions
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