The risk assessment must take into account the pumped gases, by-products, and all components mak-
ing up the installation. The following situations are hazardous and must be avoided at all cost:
● Flammable or pyrophoric gas concentrations in the flammable range.
● Flammable or pyrophoric gas concentrations above the flammable range (a leak could potentially
cause the concentration to drop down into the flammable range).
● Insufficient dilution.
● An accumulation of reactive solids in the exhaust.
● Exposure of chemically-reduced species or reducing agents to oxidizing agents.
The following general safety recommendations must be applied
:
● Ensure leak-tightness throughout system.
● Do not allow oxidizing agents (air, other gases, etc.) to mix with flammable/pyrophoric gases.
1)
● Ensure that the oxidizing agent concentration does not exceed 60% of the maximum permissible
concentration of the oxidizing agent gas (MOC)
2)
, mainly when the dilution is not sufficiently high
to reach 25% of the LEL.
● Perform a nitrogen gas purge prior to carrying out maintenance on the pumping line (inlet side,
pump and exhaust lines).
● Regularly clean away reactive by-products such as silicon dust from the exhaust line to prevent
clogging and/or explosion.
For further details on the safety instructions relating to flammable and pyrophoric gases, contact our
service center.
Affix labels to the pump to identify the hazards inherent in all the above applications (flammability, ex-
plosion, toxicity, corrosion, etc.) and comply with the SEMI S1 requirements. This information must be
added to the equipment operating instructions intended for end users.
2.4 Precautions
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
● Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
Only qualified personnel trained in safety regulations (EMC, electrical safety, chemical pollution) are au-
thorized to carry out the installation and maintenance described in this manual. Our service centers can
provide the necessary training.
►
Secure the pump in strict compliance with the installation requirements
.
► Do not expose any part of the human body to the vacuum.
► Follow the safety and accident prevention requirements.
► Regularly check compliance with all precautionary measures.
► Do not remove the blanking plates sealing the inlet and exhaust ports if the product is not con-
nected to the pumping line.
► Do not operate the product unless the inlet and exhaust are connected to a vacuum and exhaust
pumping line.
► Before working on the inlet flange, wait until the rotor is immobilized.
► Keep pipes and cables well away from hot surfaces (> 70°C).
1)
Reference NFPA 69-2019, § 8.3.1 chap.8 Deflagration prevention by combustible concentration reduction.
2)
Reference NFPA 69-2019, § 7.7.2.5 chap.7 Deflagration prevention by oxydant concentration reduction.
Safety
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