WARNING
Risk of injury in case of contact with pressurized water
The product uses pressurized water as a cooling fluid. Non-compliant installations or installations not
done to professional standards may endanger the user’s life.
► Install a manual valve on the circuit at a distance of 3 m from the product, so that the water sup-
ply can be locked out.
► Observe the recommended pressure and pressure differences.
► Always lock out and disconnect the water circuit before working on the product.
► When carrying out maintenance, secure the installation properly by locating and locking out the
pressurized water circuit to prevent it from being re-engaged by accident (LO/TO Lock Out/Tag
Out procedure).
► Regularly check the condition of the pipework and supply circuit connections.
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange
With the high vacuum flange open, access to sharp-edged parts is possible. A manual rotation of the
rotor increases the danger situation. There is the risk of cuts, up to the separation of body parts (e.g.
fingertips). There is a risk of hair and loose clothing being drawn in. Objects falling in destroy the tur-
bopump during subsequent operation.
► Only remove the original protective covers immediately prior to connecting the high vacuum
flange.
► Do not reach into the high vacuum connection.
► Wear protective gloves during installation.
► Do not start the turbopump with open vacuum connections.
► Always carry out the mechanical installation before electrical connection.
► Prevent access to the high vacuum connection of the turbopump from the operator side (e.g.
open vacuum chamber).
WARNING
Risk of burns in case of contact with hot surfaces
For the operator's safety, the products are designed to avoid thermal risk. Depending on the applica-
tion, the conditions of use generate high temperatures which require extra caution from users (surfa-
ces > 65 °C).
► Pay attention to the marking of hot surfaces indicated by safety labels.
► Wait for the part to cool completely before working on the product.
► If necessary, wear protective gloves in accordance with standard EN 420.
2.3 Safety instructions relating to flammable/pyrophoric materials
It is the user and/or integrator who is/are solely responsible for the safety of the pump installation, the
equipment and the gas exhaust extraction system. The user and/or the integrator is responsible for the
application which uses the product.
Pumping pyrophoric or flammable gases may be hazardous. The user and/or integrator must comply
with the safety instructions below and conduct a risk assessment.
DANGER
Danger of death by explosion or fire related to pyrophoric/flammable gases
Semiconductor, photovoltaic panel, flat panel display and industrial processes may use pyrophoric or
flammable gases. When mixed with oxidizing agents, these gases can spontaneously combust (pyro-
phoric gases) or combust when ignited as a result of an unintended chemical reaction (flammable
gases). In the worst case scenario, this could start a fire or set off an explosion causing metal parts to
be ejected and serious injury to nearby persons.
► Conduct a risk assessment to assess the dangers before installing the pump.
► Install safety systems that comply with the requirements of the EN 50495 standard.
Safety
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