Page 4 Instruction manual Parker X-Flow FM-1407 Rev - 11/2021
1 General Product Information
1.1 Introduction
This user guide covers the X-Flow™ mass flow controllers for gasses as shown in the pictures below.
Included is product information, installation instructions, operation, maintenance, troubleshooting and
technical specifications.
601XF
1.2 Intended Use
The intended use of X-Flow™ instruments is to control gas flow rates of the specified gas noted on the
instrument label. The gas must be clean.
The instruments can be used for either (fast) switching or controlling a constant flow rate.
1.3 Symbols
Important information. Discarding this information could cause injuries to people or damage to
the Instrument or installation.
Helpful information. This information will facilitate the use of this instrument.
Additional info available from the factory or your local sales representative.
1.4 Product Support References
Instructions:
Operating instructions digital instruments, document FM-1245.
RS232 interface with FLOW-BUS protocol, document FM-1249
Technical drawings:
Hook-up diagram X-Flow™, document FM-1409
X-Flow™ Dimensional drawing 601XF, document A-4539
X-Flow™ Transition Plate Dimensional drawing, document A-4540
All these documents are available at
www.parker.com/precisionfluidics/X-Flow™
or by request to [email protected].
Summary of Contents for X-Flow FM-1407
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