Chapter 4 Description of Functions
4-40
4
Beam pwr ctrl cnt.
In the measurement mode (multi-zone beam control measurement, constant
pitch measurement and multi-select displacement sensing) using the mul-
ti-zone beam control, multiple beam controls are performed. The last meas-
urement is obtained to use for acquisition of the shape waveform or waveform
calculation.
When the count of this beam power control is increased for a workpiece
mixed with black and white parts, stable measurement c an be performed.
However, the sampling cycle is longer in proportion to this number.
Item
Set values
Beam power con-
trol count
0 <Continuous>, 1 time, 2 times (default value), 3 times,
4 times
In
"Whole synchronized measurement mode"
, the count of beam power
controls is fixed to
"0 <Continuous>"
.
"0 <Continuous>"
is the operation using the control value, which is ob-
tained from the result at a certain beam power control unit area, at the adj a-
cent beam power control unit area.
● Relation of unit detection time, sensitivity adjustment and
beam power control count
The relation of set values in multi-zone beam control (MZBC) is as follows.
Determine the sensitivity ratio used for the beam control 1st from the detected
light intensity of the beam control 0th against the beam control unit (each
zone) of the multi-zone beam control mode; the measuring points of the con-
stant pitch mode; and the measuring points of the multi -select displacement
measurement. While repeating this operation up to the beam power control
count, the detected light intensity is optimized.
Unit detection time
(Sensitivity ratio 100%)
Sensitivity ratio [%]
Sensitivity ratio [%]
Beam power control 0th
Beam power control 1st
Unit detection time
(Sensitivity ratio 100%)
Summary of Contents for HL-D3 Series
Page 9: ...Preface 7 ...
Page 27: ...Preface 24 MEMO ...
Page 43: ...Chapter 1 Before Use 1 16 1 MEMO ...
Page 219: ...Chapter 4 Description of Functions 4 140 4 MEMO ...
Page 298: ...1 Apx Appendix 1 Index 2 ...
Page 304: ......