ALD
Ozone Delivery System
Oxford Instruments Plasma Technology
Equipment Manual
SERVICES
Printed: 14-Jul-10, 7:06
Page 2-2 of 2
Issue 01: July 10
2.1
Services requirements
The
ALD
Ozone Delivery System is only intended for use in conjunction with a
FlexAL
or
OpAL
system. This document gives generic information and mandatory requirements for all services.
2.2
Quantitative requirements
2.2.1
Facilities inlet connections
a)
Compressed air with a pressure >5 bar
b)
Oxygen with a pressure between 2 bar and 3 bar
2.2.2
Outlet connections
a)
Compressed air exhaust
b)
Ozone supply to the ALD chamber
c)
Ozone out to the exhaust (atmospheric pressure side of pump)
2.2.3
Connections between the ozone delivery system and the ALD system
a)
AC electrical power
b)
24 VDC control signals
c)
Compressed air to drive the remote isolation valve (OpAL systems only)
Summary of Contents for OpAL
Page 14: ......
