OIPT Systems
Oxford Instruments Plasma Technology
System Manual
3.
Electrical supply
Classification: For European Community customers who need this information: The
systems are classified as Class A, Group 2 as defined in EN 55011 Clause
4.
Phase 1
conductor
Phase 2
conductor
Phase 3
conductor
Neutral
conductor
SAFETY
ISOLATION
BOX
3-Phase
supply
to
system
PLASMALAB
OR
IONFAB
SYSTEM
INDEPENDENT
EARTH (GROUND)
3-phase supply
or transformer
secondary
winding
Hand
Operated
NEUTRAL CONDUCTOR
BONDED TO EARTH
(GROUND)
Combined Circuit Breaker
to protect transformer
to system phase conductors
Fig 3.1: Recommended electrical installation
NOTES: a) The combined Circuit Breaker MUST break all phases if any one phase
exceeds the set current limit.
b) The trip rating of the Circuit Breaker depends on the system type and
the supply voltage to the system.
c) The current-carrying capacity of the cables between the Circuit Breakers
and the system must be greater than the trip rating of the Circuit
Breaker.
For example, if a 32A Circuit Breaker is fitted then a cable having
conductors of a minimum rating of 40A (32A x 125%) is required. The
conductors will have a minimum Cross Sectional Area (CSA) of 6.0 mm
2
.
3.1
System earthing and bonding
3.1.1
Earth connection
To meet international standards for RF interference, our systems are fitted with filtration
on the mains supply inputs. As a result, there is significant leakage to earth (ground)
from the mains supply.
WARNING
IT IS ESSENTIAL THAT AN EARTH CONNECTION IS MADE BEFORE CONNECTING THE
SUPPLY.
An Earth Continuity Test is required for all PERMANENTLY CONNECTED EQUIPMENT, using
a ‘CLARE’ tester or similar equipment.
Services Specifications
Issue 21: January 10
Page 10 of 22
Printed: 6-Jan-10, 8:53
Summary of Contents for OpAL
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