Orbotech SPTS Xactix e1 Series Manual Download Page 1

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Manual Version e1-4.3.0.ae-R3 (2015/04)

Xactix

® e1

Series System Manual

Summary of Contents for SPTS Xactix e1 Series

Page 1: ...Manual Version e1 4 3 0 ae R3 2015 04 Xactix e1 Series System Manual ...

Page 2: ...sing this manual as a guide Document Control Please refer to the Document Number listed below when inquiring about Operations Manual updates Document No SYS1412145 EX178 Issued To UCL Document revisions and copies of this manual in other media such as cleanroom paper copies or CD ROM versions can be requested by contacting the SPTS Technologies A fee will be charged for additional copies Contact I...

Page 3: ...ntended Releases 13 3 DESCRIPTION OF THE PRODUCT COMPOSITION OF THE PRODUCT 14 4 ASSEMBLY INSTALLATION FIRST OPERATION 16 4 1 Preparation 16 4 1 1 General Requirements of the Site 16 4 1 2 Dimensions and Weights 16 4 1 3 Space Requirements 17 4 1 4 Electrical Services Required 18 4 1 5 General Ambient Temperatures 18 4 1 6 Gas Requirements 19 4 1 7 Exhaust Requirements 20 4 1 8 Installation Materi...

Page 4: ...INTENANCE SCHEDULE 85 6 1 Shutting Down 85 6 2 Electrical and Gas Disconnect and Lockout Tagout 85 6 2 1 Electrical Disconnect 85 6 2 2 Gas Supply Disconnect and Lockout Tagout 86 6 2 3 Panel Layouts 87 6 3 Turning on the System after Maintenance 87 6 4 Procedures and Schedules 88 6 4 1 Maintenance Procedures 88 6 4 2 Regular Inspection 88 6 5 Recommended Spare Parts 88 6 6 XeF2 Bottle Change 88 6...

Page 5: ...13 8 DISMANTLING DEMOLITION STORAGE AND TRANSPORT 114 8 1 Dismantling and demolition 114 8 2 Storage 114 8 2 1 Storage in the clean room 114 8 3 Storage and transport 114 9 BREAKDOWNS AND REPAIRS 115 9 1 What to do in case of a problem 115 9 2 Contacting Customer Support 115 10 DISCARD 116 ...

Page 6: ...tem characterization to minimize over shoot and undershoot of XeF2 pressure in expansion chamber n During etch process chamber pressure is sampled at regular intervals plotted in the GUI and stored for later review 5 Inspection The system provides the ability to view entire surface of sample up to 6 wafer while it is being etched through a transparent process chamber lid and shower head 6 Safety T...

Page 7: ...ction for two thermocouples in the vacuum stack and automatic logging and plotting in the GUI of the temperature recorded by the thermocouples Available with purchase of the Advanced Experimentation Manufacturing Package g Add an MFC and pressure controller to implement a second type of etching which uses a continuous flow of XeF2 This is in addition to the standard pulsed flow etching The continu...

Page 8: ...stem is process contaminant free routine maintenance can be undertaken wearing a face mask double gloved nitrile gloves and chemically resistant safety goggles that comply with BS EN 166 and or ANSI Z87 1 CAUTION PPE for Non Vented Systems When the system cannot be vented there are strict procedures that must be followed and full PPE suitable for dealing with XeF2 and its by products must be worn ...

Page 9: ...2 and HF CAUTION Safety Goggles It is recommended that maintenance personnel wear safety goggles that conform to the current local safety standards or minimally to BS EN 166 and or ANSI Z87 1 2 3 Mechanical Safety CAUTION XeF2 When the system cannot be vented there are strict procedures that must be followed and full PPE suitable for dealing with XeF2 and its by products must be worn Please refer ...

Page 10: ...en compressed air is used for blowing away swarf or dust or for cooling purposes Many functions on the equipment are operated pneumatically all appropriate local Lockout Tagout procedures must be complied with whenever the compressed air system is being worked on Hoses fittings regulators and valves should be inspected periodically for leaks damage and other defects Customer should install regulat...

Page 11: ...ver be left unattended Live electrical work should not be carried out by a lone worker If electrical equipment is to be isolated using a breaker tripped to OFF a DVM must be used to ensure that the equipment is no longer energized If a safety interlock is defeated to facilitate maintenance work the following procedures should be administered to safeguard personnel and minimize the hazard Safety ba...

Page 12: ...and type of leak 2 6 3 Treatment of Exhaust Gases 1 It is the customer s responsibility to ensure exhaust gases from the backing pump are abated in a manner that conforms to national and or local environmental and safety regulations The following information is for guidance only 2 There are three techniques for the treatment of harmful gases Where more than one option is available the choice of te...

Page 13: ...t procedure will pump purge the process chamber and gas train so that any remain contaminants will be below the Threshold Limit Value TLV However the gasbox components such as valves pressure sensors and MFC if present and associated pipework may still contain above Threshold Limit Value TLV contaminants 2 8 Gas Lines Toxic Non Toxic CAUTION General Health Risk When undertaking maintenance on haza...

Page 14: ...r must be informed immediately and the area cleared of personnel depending on the liquid released 2 PPE may be required Collect the spillage kit and immediately surround the spillage with the absorbent cloths pillows etc until the spillage has been contained 3 Obtain the MSDS and read the section which relates to emergency release measures The MSDS will also give you the relevant information on th...

Page 15: ...at contaminated material is disposed of in accordance with appropriate site policy and procedures Cleanroom wipes and abrasives will become contaminated during cleaning procedures Ensure that contaminated wipes and abrasives are placed inside a clearly labelled bag and disposed of in accordance with appropriate site policy and procedures 2 12 Unintended Intended Releases The system is designed to ...

Page 16: ...se the e1 Series simply place your wafer die or other structure into the etch chamber close the lid set the etching conditions and press start on the software The details of the process sequence are captured in the control software and the user just has to set target etch conditions Etch progress is easily monitored using the stereomicroscope located above the transparent chamber lid Installation ...

Page 17: ...chamber N2 regulator in the gas box which controls the pressure of the N2 for the venting of the main chamber and N2 filling of the expansion chamber Higher pressures lead to faster fill rates but may lead to reduced fill accuracy or in the case of venting disturbances to the sample Needle valve for accurately adjusting the flow rate of N2 for the Expansion chamber is located on the left side of t...

Page 18: ...d the system Normal clean room and or laboratory environmental conditions are adequate for the system WARNING BECAUSE OF THE WEIGHT OF THE XACTIX E1 SERIES THREE OR MORE PEOPLE ARE REQUIRED DURING THE INSTALLATION TO REMOVE THE UNIT FROM THE SHIPPING CONTAINER AND TO POSITION IT INTO ITS FINAL POSITION FOR OPERATION 4 1 2 Dimensions and Weights Crated dimensions W x D x H 54 5 x 34 x 58 5 1385mm x...

Page 19: ...ries in the clean room or laboratory environment is shown in Figure 2 In addition sufficient space must be provided behind the unit or in the service chase for the system s electrical box see Figure 3 and vacuum pump see Figure 4 Figure 3 e1 System electrical power box to be mounted near e1 This unit is connected to the e1 system via a 5m cable connecting to the left of the electrical box The mass...

Page 20: ...terminating with bare wires as standard It is the responsibility of the customer to provide a suitable mains connector that complies with the local regulations governing electrical connections The vacuum pump is controlled via the system s electrical box 4 1 5 General Ambient Temperatures The area accommodating the e1 Series should have Adequate space all around the unit for servicing Adequate spa...

Page 21: ...d to prevent possible damage or explosion of the cylinder and or cylinder valve The customer must also provide a suitable pressure regulator Matheson MA 18 or equivalent with a shut off valve for the process gas supply A source of clean dry air compressed to 70 100 psi is required for operation of the pneumatic valves The customer must provide a suitable pressure regulator with shut off valve for ...

Page 22: ...e Gas Box Exhaust 15 m 3 hr 25 Pa Static Pressure WARNING THE EXHAUST GAS FROM THE OUTPUT PORT OF THE E1 SERIES S VACUUM PUMP MUST BE VENTED INTO A SUITABLE FUME EXHAUST SYSTEM ANY FITTINGS AND OR TUBING REQUIRED SHOULD BE OBTAINED LOCALLY WARNING THE CUSTOMER SHOULD SUPPLY EXHAUST VENTILATION TO THE GAS BOX THIS IS ACCOMPLISHED BY THE CUSTOMER CONNECTING A 2 INSIDE DIAMETER VENTILATED HOSE TO THE...

Page 23: ...he Nitrogen process gas lines to prevent the process Nitrogen gasses from exceeding 100 psi at the rear system connections Gas regulator for Nitrogen gas box purge gas some systems do not require this purge please contact SPTS for more information Gas cylinder mounting bracket bench mount or wall mount if using gas cylinder Gas box exhaust hose Chamber shroud exhaust hose Vacuum pump exhaust tubin...

Page 24: ...thing Consult local requirements Process gases 40 cu ft min Nitrogen 20 psi outlet Provide safety overpressure device for Nitrogen process line Max 100 psi One cylinder of xenon difluoride for e1 Series See below for bottle and valve CDA Compressed dry air 70 100 psi Gas box purge gas Nitrogen 5 psi some systems do not require this purge please contact SPTS for more information Used to supply dilu...

Page 25: ...er and valve for XeF2 Figure 5 Xenon Difluoride Lecture Bottle drawing not to scale Cylinder size Maximum XeF2 A B C D 0 3 L 0 6 kg 51 mm 253 mm 273 mm 325 mm Cylinder Seamless Aluminum Valve Stainless steel angle diaphragm valve and VCR male outlet ...

Page 26: ...e shipper and contact SPTS immediately Also please keep this crate for future system storage and shipment Figure 6 Crated system Note that the crate should be lifted from the end as shown in Figure 7 4 4 2 Storing the System Before Installation If necessary store equipment in a secure indoor location free from traffic moisture dirt and in a temperature range of 5ºC to 55ºC Do not stack the crates ...

Page 27: ... THE WEIGHT OF THE E1 SERIES THREE OR MORE PEOPLE ARE REQUIRED DURING THE INSTALLATION TO REMOVE THE UNIT FROM THE SHIPPING CONTAINER AND TO POSITION IT INTO ITS FINAL POSITION FOR OPERATION Using a power screwdriver start opening the crate by removing the side panel labeled Open This Side First as shown in Figure 6 ...

Page 28: ...ent may have been subjected to mishandling In addition you should look for any included tip sensors inside of the crate see Figure 9 for any other indications of mishandling mishandling is indicated by blue powder in the upper portion of the arrow Figure 9 Tip sensor CAUTION Some of the boxes in the crate are heavy and may require two people to safely remove ...

Page 29: ...M THE SHIPPING CONTAINER AND TO POSITION IT INTO ITS FINAL POSITION FOR OPERATION The system should be picked up with 3 or more people or other appropriate technique from the bottom being careful not to damage any external system components and placed onto a suitable work surface Lastly place the all accessories to its operation location in your processing facility ...

Page 30: ...ustomer supplied exhaust 9 Connect e1 Series to power controller box see Figure 14 and Figure 16 10 Connect e1 Series to computer through the DeviceNet cable see Figure 14 and Figure 17 11 Connect power to pump from power controller box see Figure 18 set pump power switch to ON position 12 Connect customer supplied pressure relieved nitrogen line max 100 psi to process nitrogen connection see Figu...

Page 31: ...Manual Version e1 4 3 0 ae R3 Page 29 Figure 10 One of four levelling feet Figure 11 Close up of vacuum connection with bellows attached ...

Page 32: ...Manual Version e1 4 3 0 ae R3 Page 30 Figure 12 Edwards nXDS6i pump Figure 13 Pump ballast control should be set to open as show ...

Page 33: ...Manual Version e1 4 3 0 ae R3 Page 31 Figure 14 DeviceNet and power connections to rear of e1 Series DeviceNet connection Power connection ...

Page 34: ...Manual Version e1 4 3 0 ae R3 Page 32 Figure 15 Power controller box Figure 16 e1 to power controller cable connection ...

Page 35: ...Manual Version e1 4 3 0 ae R3 Page 33 Figure 17 DeviceNet connection on rear of PC Figure 18 Pump power connection ...

Page 36: ...Manual Version e1 4 3 0 ae R3 Page 34 Figure 19 Rear Gas Connections of system Figure 20 Set N2 regulator to approx 10 psi ...

Page 37: ...Manual Version e1 4 3 0 ae R3 Page 35 Figure 21 CDA pressure regulator and connection Figure 22 Gas box exhaust connection CDA pressure regulator CDA inlet connection ...

Page 38: ...Manual Version e1 4 3 0 ae R3 Page 36 Figure 23 Shroud ventillation connection Shroud ventilation connection ...

Page 39: ...Manual Version e1 4 3 0 ae R3 Page 37 Figure 24 Showerhead stop Figure 25 Insert showerhead stop into holes behind chamber Note it is not necessary to expose adhesive ...

Page 40: ...Manual Version e1 4 3 0 ae R3 Page 38 Figure 26 Showerhead stop installed ...

Page 41: ...st examine the box shown in Figure 27 which is inside of the front system panel The top light LINE POWER should be lit which indicates there is 100 120 VAC or optional 220 240 VAC to the system The lower light CONTROL POWER should initially not be on This light indicates that the power that controls the system components is on To turn on the CONTROL POWER press the CONTROL POWER RESET button CONTR...

Page 42: ...perature can stabilize Also be certain that the room temperature is between 65ºF and 75ºF 18ºC to 24ºC and does not fluctuate After the warm up period start the computer system Then the e1 Series control program which is located under Start Button Programs Xactix Xetch will auto start if it is not set to auto start it can be started manually After the initialization procedure a dialog box will app...

Page 43: ...rs have been purged This routine will last approximately ten minutes At the end of this process the control screen will display a log in menu as shown below The e1 Series is now ready for use If the system does not reach this menu within 1 hour of startup see Section 6 16 WARNING ALL LOCKABLE PANELS TO THE E1 SERIES SHOULD BE LOCKED AND ONLY UNLOCKED BY TRAINED PERSONNEL ON AN AS NEEDED BASIS TO P...

Page 44: ...In this mode the machine pumps and purges all of the machine chambers assuring the user that the chambers are purged In Quick mode the chambers are simply pumped down with no purging performed This mode is useful when the state of the system is known upon startup and no purging is necessary In Maintenance only mode the etch menu and load sample menu are disabled and only the maintenance menu can b...

Page 45: ... is required to input their username and password which will be assigned to them by the system administrator The KB button beside the Username and Password field can be used to access the on screen keyboard The system administrator can log in to the system by inputting admin as the username A password can be created after the initial log in as the administrator for the first login the password fie...

Page 46: ...en dots represent open valves Pressure gauges for the main chamber and the expansion chamber are at the bottom right The three options available on the main menu consist of performing an etch loading unloading a sample and accessing the maintenance menu 5 2 1 Sample Loading To load unload a sample 1 Press Load Unload sample on LCD screen The system will go through prompts to ensure a correct decis...

Page 47: ...le If the sample holder and pins have not been placed inside of the chamber and you wish to do so please do so now See Figure 31 and Figure 32 5 Close the lid 6 Press Done on LCD screen as shown below the system will go through a purging cycle prior to chamber pump down As a side note the Examine button only pumps the chamber down without purges so that the system can be quickly vented to load the...

Page 48: ...Manual Version e1 4 3 0 ae R3 Page 46 Figure 29 Chamber ventilation shroud moved to back ...

Page 49: ...Manual Version e1 4 3 0 ae R3 Page 47 Figure 30 Chamber ventilation shroud pulled forward ...

Page 50: ...n the View Log button on the Main Menu The log file is a database that is queried by beginning date and ending date The Today button will automatically set the dates to the current month day and year The lot number username recipe note s keyword s and or etching mode used can further specify your search Wildcard characters may be used to fully specify the search criteria ...

Page 51: ...Manual Version e1 4 3 0 ae R3 Page 49 If the boxes are left blank clicking the search button will reveal all history info displayed in a tabular form ...

Page 52: ...oice such as Microsoft Excel Microsoft Access and Microsoft Word as shown below Choosing a destination folder can be done by clicking on the folders icon at right side of the File Dialog screen A default folder for saving log files and photos may be selected in the System Configuration Menu File names are automatically entered in this form 2003 12 13_001 txt This represents the year month day and ...

Page 53: ... automatically scrolled to the bottom of the file the Top or Bottom buttons are used to scroll instantly to the top or to the bottom of the log file The result of the detailed information display is below One unique feature of this menu is that comments can be typed into the Notes area however the number of characters is limited to 250 One other item to note is that the Average Overall Cycle time ...

Page 54: ...ntly performed The log can also be useful for accessing the exact start and end times of a run The change password button allows a user to change their password by entering their username and previous password The log out button is used to exit the system A prompt will appear once the button has been pressed inquiring if the user wishes to log out Once the log out has been completed the system ret...

Page 55: ...l directory to the current user s personal directory This option is limited to users with configurable etch access The current user s personal recipes are displayed in the left box in this case admin The personal directory for other users is found in the right box The pull down bar at the top right can be used to select from the personal recipes of various users To copy a recipe into the current u...

Page 56: ...ional upgrades The etch mode at the bottom middle of the perform etch screen can be used to select the etch mode The normal mode included at delivery utilizes a pulsed etch with a set xenon difluoride and nitrogen if desired pressure and etch time Normal with delays mode included at delivery utilizes a pulsed etch with a set xenon difluoride and nitrogen if desired pressure and etch time but also ...

Page 57: ...ich at any time during an etch can be used to add cycles to the etch in progress Once selected the Change of Cycles menu on next page is prompted The top row of arrows will add cycles in this order right to left ones tens hundreds and thousands the lower row of arrows having the same values will remove cycles All the user has to do is click on the designated arrow for the desired number of cycles ...

Page 58: ...enu If No Keep Waiting is chosen only the current cycle will be completed before returning the user to the main menu At the bottom of the screen there is a figure labeled ETA This feature displays the expected completion time The ETA is continuously updated during the process run Once the desired recipe settings have been chosen then etching can be initiated By pressing the Start Etch button at th...

Page 59: ...ng their username and previous password The log out button is used to exit the system A prompt will appear once the button has been pressed inquiring if the user wishes to log out Once the log out has been completed the system returns to the login screen Parameters for the etching modes can be set by adjusting the sliders tapping the up and down arrows or direct entry by pressing the N button Also...

Page 60: ... the opening of the valve between the expansion chamber and the process chamber and the opening of the valve between the process chamber and the pump XeF2 Pressure In order to introduce the proper amount of xenon difluoride into the main chamber a set pressure charge of xenon difluoride must be delivered to the expansion chamber Because xenon difluoride has a vapor pressure of 4T at room temperatu...

Page 61: ...etching for a set amount of time and evacuation of the main chamber and expansion chamber Etch Time When the valve between the main chamber and expansion chamber is opened the pressure equilibrates and the etching process begins The etch time is the time between the opening of the valve between the expansion chamber and the process chamber and the opening of the valve between the process chamber a...

Page 62: ...peration of the e1 Series in the advanced normal mode optional upgrade is similar to the normal mode however in the advanced mode which is a XeF2 only process the user can set the pump down pressure in the expansion chamber The advanced normal mode allows for full optimization around the etch rate and cycle time leading to a higher throughput and its screen is shown below 5 3 7 1 Advanced Normal M...

Page 63: ...o the main chamber a set pressure change of xenon difluoride must be delivered to the expansion chamber Because xenon difluoride has a vapor pressure of 4T at room temperature the upper limit for the XeF2 pressure is approximately 4T Due to the slightly elevated temperature inside of the etcher cabinet you may be able to get considerably higher XeF2 pressures Pump out Pressure The pump out pressur...

Page 64: ...essure in the expansion chamber etching for a set amount of time and evacuation of the main chamber and expansion chamber Note that there is a range button which changes the slider range for selecting larger numbers Etch Time When the valve between the main chamber and expansion chamber is opened the pressure equilibrates and the etching process begins The etch time is the time between the opening...

Page 65: ... recipe to improve selectivity The pressure obtained in the expansion chamber likewise controls the amount of nitrogen introduced into the process chamber Chill Pressure Between each cycle the Main Chamber can be pressurized with nitrogen which corresponds to the Chill Pressure setting Chill Time The time that the main chamber remains at the Chill Pressure between each cycle is specified by the Ch...

Page 66: ...g on valve icons changes the color between red and green corresponding to closed and open respectively Also within the maintenance menu there are nine options These options consist of adding and deleting users editing the configuration menu leak back checking the system purging the main chamber gauge recalibrating changing the xenon difluoride bottles see page 85 exiting the e1 Series software vie...

Page 67: ... by beginning date and ending date The Today button will automatically set the dates to the current month day and year The lot number username recipe note s keyword s and or etching mode used can further specify your search Wildcard characters may be used to fully specify the search criteria If the boxes are left blank clicking the search button will reveal all history info displayed in a tabular ...

Page 68: ...oice such as Microsoft Excel Microsoft Access and Microsoft Word as shown below Choosing a destination folder can be done by clicking on the folders icon at right side of the File Dialog screen A default folder for saving log files and photos may be selected in the System Configuration Menu File names are automatically entered in this form 2003 12 13_001 txt This represents the year month day and ...

Page 69: ... automatically scrolled to the bottom of the file the Top or Bottom buttons are used to scroll instantly to the top or to the bottom of the log file The result of the detailed information display is below One unique feature of this menu is that comments can be typed into the Notes area however the number of characters is limited to 250 One other item to note is that the Average Overall Cycle time ...

Page 70: ... click details on the display detailed etch info screen shown on next page to view the log file in its entirety In the notepad program the date time and actions executed are displayed as shown below The level of detail included in the details of the full log is controlled by the settings related to the log file in the System Configuration Menu which is described later ...

Page 71: ...ivileges to various users Only the System Administrator can access the user manager Users can be added using the New button while current users can be removed using the Delete button To change a user s privileges the Edit button can be used To exit the User Manager and return to the maintenance menu click on Done ...

Page 72: ...ble for users Maintenance Access gives a user permission to access the maintenance menu thus giving them the ability to execute such functions as changing the machine configuration changing the xenon difluoride bottle and viewing the full log WARNING MAINTENANCE MODE SHOULD ONLY BE PROVIDED TO THOSE INDIVIDUALS WHO UNDERSTAND THE RISKS OF EXPOSURE TO XEF2 AND ARE FULLY TRAINED IN THE USE OF THE MA...

Page 73: ...eges A number of allowed recipes can be given to the user and by checking the box next to the recipe name it can be enabled For example a user without the ability to configure their etch can have say 20 recipes However if only 1 is turned on they will have access to only that 1 recipe This is useful for those operators that may have a series of lots to process and the Administrator can enable the ...

Page 74: ... relating to basic system parameters startup parameters standby parameters maintenance parameters etch parameters and validation codes NOTE The validation code should only be changed by the system administrator To edit the configuration menu select the Edit CFG option in the maintenance menu The following options will appear as follows ...

Page 75: ...systems Otherwise the software will operate in a simulation mode Machine Present Query for the presence of e1 Series machine This should also be normally set to true Keyboard Present Query for the presence of an external keyboard It is suggested to leave this as false even if there is a keyboard since setting it to true removes many of the on screen keyboard functions that may be convenient Log Da...

Page 76: ... difficult to open in most text viewers Process Volume Volume of process chamber This should be set to 660 cm 3 Expansion Ch Volume Volume of expansion chamber This should be typically set to 558 cm 3 Image Brightness Red brightness green brightness and blue brightness settings used only for the optional upgrade for the image acquisition system Automatic Gauge Calibration Time Sets the number of d...

Page 77: ...llows the user to set the nitrogen pressure for expansion chamber purge cycles during the machine startup Exp Purge Low Allows the user to set the vacuum pressure expansion chamber purge cycles during the machine startup Flush Cycles Allows the user to set the number of flush cycles during the machine startup A flush cycle consists of 20 seconds that V7 V5 V3 and V11 are open 20 seconds that V7 V5...

Page 78: ... chamber for purging the system during the load unload cycle Exp Purge Low Allows for the user to set the pressure that expansion chamber is pumped down to when purging the system during the load unload cycle Exp Standby Allows the user to set the base pressure in the expansion chamber for the pump down process ATM Pressure Allows the user to define the set point for the atmospheric pressure light...

Page 79: ...ssure for the purge cycles prior to disconnecting the XeF2 bottles Pre Change Vac Time Allows the user to set the amount of time that the vacuum valve is open prior to disconnecting the XeF2 bottles Closed Bottle Cycles Allows user to set the number of purge cycles to remove atmospheric gas from the lines following a XeF2 bottle change Closed Bottle High Allows user to set the nitrogen pressure fo...

Page 80: ...p which can still be performed by pressing the STOP button twice which immediately evacuates all chambers closes all valves and returns to the main menu Allow In Progress Cycle Changes Allows the user to add additional cycles to an etch while etch is still in progress Show overtime warning and Overtime threshold If this is enabled a warning message will be displayed to alert the user that the syst...

Page 81: ...is is the tolerance that the Wait for pre etch stability routine must satisfy before proceeding to etch the wafer Pre etch stability cycles If Wait for pre etch stability is selected this setting allows the user to set the number of pre cycles in a row that must be within tolerance before stability is considered to be achieved Max stability cycles If Wait for pre etch stability is selected this se...

Page 82: ...on Pre Cycles Pressure Estimation Pre Cycles Allows the user to set the number between 0 and 10 of pre cycle pressure purging cycles and only applies if Wait for pre etch stability is not selected This is the number of pre cycles cycles that only fill and empty the expansion chamber without exposing the wafer to etch gases that will be run before starting the etch please note that the XeF2 Pressur...

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Page 84: ...formed and the rates will be displayed When the test is complete and you have observed the rates press Done to return to the Maintenance Menu This test can be misleading for the main chamber however since most apparent leaks are actually trapped gas in the showerhead Maximum test time and long pumpdown 60 min time should be used for best results The main key to distinguishing between a leak and tr...

Page 85: ...of pump time and assumed chamber base pressure The manometers are zero calibrated to 05 T or 50 mT which is the assumed base pressure of the system Pressing the Calibration History button accesses a log file for the recalibration function The Set Defaults button can be used to save recalibration settings for easy one touch use Set the preferred settings and press Set Defaults this will allow these...

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Page 87: ...maintenance menu manually open all valves except valves 11 8 and 9 and let the system pump down for one hour For instructions on how to manually actuate the valves see section 6 14 4 Return to the main menu To turn off the system 1 Logout of the system 2 Press the shutdown button on the login screen 3 Turn off the system by pressing the main system off button as shown in Figure 28 4 Turn off the m...

Page 88: ...the gas supply to the system and be the customer supplied lockout tagout procedure used to prevent accidental pressurization of the system The N2 regulator inside of the gas box should also be reduced to zero psi note that the N2 regulator inside of the system is not relieved so reducing the regulator will only prevent additional gas from coming into the system N2 in the lines could be relieved by...

Page 89: ...n the System after Maintenance If the system was unplugged and locked out restore power to the system by plugging it back in to the electrical outlet If the pressurized gasses were turned off turn them back on at the customer supplied regulator assuring that the supply pressures do not exceed those listed in section 4 1 6 Follow the procedures in section 4 7 to start the system DIGITAL I O MODULES...

Page 90: ...available when needed for routine maintenance Additional spare parts including those listed are available in various kits offered by SPTS Critical Spares and Extended Spares Contact your SPTS service representative for information for ordering these kits Part Number Description Qty 3006548 nXDS Tip Seal 1 VAH1112 O RING VI 112 1 VAH1373 O RING VI 2 373 1 VAB0037 6 ACRYLIC SHOWERHEAD ASSEMBLY 1 6 6...

Page 91: ...RATIVE THAT THESE DIRECTIONS BE FOLLOWED EXACTLY TO SAFELY CHANGE THE XENON DIFLUORIDE BOTTLE USE THE PPE DESCRIBED IN SECTION 2 2 Beginning from the Main Menu screen click on Maintenance Menu To change the gas bottle click on the top right button Change XeF2 bottle shown in Figure 39 ...

Page 92: ...Manual Version e1 4 3 0 ae R3 Page 90 Figure 38 Bottle connection location Bottle Connection Bottle Clamp fasteners ...

Page 93: ...your organization may decide to choose another pressure value to make the bottle change determination For example if the pressure displayed is above approximately 2 Torr click NO and you will be returned to the maintenance menu If the pressure is below approximately 2 Torr click YES and the bottle change will continue If you have chosen to change the XeF2 bottle you will be instructed to close the...

Page 94: ...y Time The e1 Series will proceed to clear out or purge the lines to assure all XeF2 gas is removed from the system lines This will take approximately 5 minutes You will then be instructed as below to remove the gas bottle refill it and replace with full bottle Be sure to leave the manual valve closed ...

Page 95: ...ainer gasket makes completing the seal less complicated by attaching itself over the VCR fitting gland The un retained gaskets require balancing the fittings until finger tight is established but can certainly be used successfully Use latex gloves when handling the gaskets to prevent dust or grease degrading the seal s performance If the gasket falls on the floor or is suspected of having scratche...

Page 96: ...Manual Version e1 4 3 0 ae R3 Page 94 Figure 40 VCR Gasket Assembly Procedure Image from www swagelok com A B C D ...

Page 97: ...cking yes then check that the female nut is sufficiently tight If leak still exists replace the gasket If leak test is passed Click YES and you will be prompted as shown to open manual valve on bottle Turn manual valve counter clockwise to open Click OK when task is complete At the end of the bottle change the software will request the mass of the XeF2 in the replaced cylinder This information wil...

Page 98: ...ful not to overtighten the valve since it can lead to serious damage Figure 41 Needle valve located in the gas box If it is not possible to fully control the flow through this adjustment it may be necessary to also adjust the nitrogen regulator setpoint see Figure 20 6 8 Roughing Pump The e1 Series ships with an Edwards nXDS6i dry scroll pump This pump does not use oil and therefore the maintenanc...

Page 99: ...ws to be removed for showerhead replacement 6 11 Showerhead hole plugs For maximum uniformity the showerhead can be plugged with Teflon plugs A length of Teflon beading is supplied with the tool and small pieces approximately 1 cm long should be cut as needed as shown in Figure 43 The cuts should be on a 45 degree angle to aid in the insertion of the plug into the showerhead Figure 43 Teflon beadi...

Page 100: ...of the gas box see Figure 46 The primary purpose of this heater is to maintain the gas box at a warm temperature 25 30 deg C The need for heating is most critical for very cold facilities since the sublimation pressure of xenon difluoride is very temperature sensitive and low temperatures will reduce the maximum xenon difluoride pressure The heater is a Positive Temperature Coefficient heater PTC ...

Page 101: ...Manual Version e1 4 3 0 ae R3 Page 99 Figure 46 Gax box heater ...

Page 102: ...ed note that it is necessary for the Show Warnings setting to be enabled in the System Configuration Menu any warning messages to be displayed This test is performed by the computer verifying that the chamber vacuum switch trips during venting 6 13 2 Vacuum interlock The purpose of the vacuum interlock is to prevent any valve from opening if the vacuum to the system is insufficient The logic is th...

Page 103: ...Manual Version e1 4 3 0 ae R3 Page 101 Figure 48 Vacuum interlock switches Chamber vacuum switch Main vacuum switch ...

Page 104: ...Manual Version e1 4 3 0 ae R3 Page 102 6 14 Manual valve operation Figure 49 Valve manifold which is mounted on the outside of the gas box towards the front of the system ...

Page 105: ...omplished using a small allen wrench or other small pointed object The valve manifold see Figure 49 has 16 buttons that can be pressed to force a valve to open For reference the valve diagram for the system is shown in Figure 50 6 15 Ventilation shroud interlock The ventilation shroud is interlocked via a safety switch lock mechanism as shown in Figure 51 This mechanism is controlled via the PC an...

Page 106: ...in 1 hour of starting the software there may be a problem Please follow the below steps 1 Be certain that the system not the computer has been powered on for more than 4 hours 2 The room temperature should be less than 75 deg F 24 deg C Reduce the room temperature to achieve this and wait for 1 2 hours 3 If the problem is not solved by this point record the pressure reading values of Main Chamber ...

Page 107: ...l Version e1 4 3 0 ae R3 Page 105 4 Press the STOP button at the lower right of the screen 5 Acknowledge the following prompt by pressing yes 6 Log in if first time use Admin as the Username and no password ...

Page 108: ...Manual Version e1 4 3 0 ae R3 Page 106 7 Go to the maintenance menu by pressing the Maintenance Menu button 8 Go to Gauge Recalibrate ...

Page 109: ...Manual Version e1 4 3 0 ae R3 Page 107 9 Set number of purge cycles to 0 and Hard Pump Time to 10 minutes ...

Page 110: ...es to support xactix com and continue on with the procedure 11 Press done 12 The Main Menu will be displayed Go to the Maintenance Menu and press Quit Program Acknowledge the prompt by pressing YES to quit the program 13 Restart the Xetch software which can be found in the Start menu or at C Program Files Xactix xetch exe 14 Allow the system to start up through normal mode 15 Rerun the Gauge Calib...

Page 111: ... is the connection between the NPT to VCR adapter and Item 2 is the connection between the bottle valve and the bottle 6 17 1 Leak check bottle 1 connection and NPT to VCR adapter Step Number Step Completed Initials Notes 6 17 1 1 Using the Maintenance Menu see Section 5 4 Open V4 for 10 minutes 6 17 1 2 Close V4 6 17 1 3 Wait 25 minutes If the pressure in the expansion chamber does not rise by mo...

Page 112: ...tightness of the NPT to VCR adapter in the bottle valve Replace the gasket at the bottle VCR fitting and rerun the leak test starting at Step 6 17 1 5 6 17 1 9 If this procedure continues to fail remove the bottle and install a VCR plug with a new VCR gasket Rerun the procedure starting at Step 6 17 1 5 6 17 1 10 If Step 6 17 1 9 passes remove the NPT to VCR adapter remove any Teflon tape re apply...

Page 113: ...minute beyond this point then there may be a leak otherwise the bottle and line are considered to be leak tight Continue to watch the pressure rise for a total of 30 minutes for signs of the leak slowing down Email these results to support xactix com 01min 02min 03min 04min 05min 06min 07min 08min 09min 10min 11min 12min 13min 14min 15min 16min 17min 18min 19min 20min 6 17 2 6 If there is a large ...

Page 114: ...1 Using the Maintenance Menu see Section 5 4 Open V10 for 30 minutes 6 18 2 Close V10 6 18 3 Wait for 2 hours If the pressure in the main chamber does not exceed 10 Torr the chamber is considered to be leak tight 6 18 4 If the main chamber is exceeds this pressure check that there is no debris on the main o ring on the chamber If any debris is found remove the debris and rerun the test start at st...

Page 115: ...Manual Version e1 4 3 0 ae R3 Page 113 7 Decommissioning Should your Xactix e1 system need to be decommissioned please contact SPTS customer support for assistance ...

Page 116: ...d running unless it will not be used for an extended period of tiem For storage in the clean room or laboratory follow the instruction to close the XeF2 cylinder and turn off the system in Section 6 1 8 3 Storage and transport Contact SPTS customer support for assistance in preparing the tool for longer term storage For storage outside the clean room and for transport Your Xactix e1 system should ...

Page 117: ...ntacting Customer Support Primary Contact SPTS Ringland Way Newport NP18 2TA UK Phone 44 1633652400 Secondary Contact SPTS Technologies 7377 William Avenue Allentown PA 18106 Phone 1 610 336 0314 When contacting SPTS for support have the following information ready The SPTS system serial number The component part number or drawing number if available An accurate description of the problem or sympt...

Page 118: ...ual Version e1 4 3 0 ae R3 Page 116 10 Discard As the system has been in contact with hazardous materials the system should be discarded by a certified company familiar with the disposal of hazardous waste ...

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