- 55 -
❖
Install a new filament into wehnelt cap.
❖
Use the special tool rotate the crimp ring clockwise.
Note:
When install the filament, the locating pin of wehnelt cap should toward to the locating
slot of filament.
6.
Mount the wehnelt cap to the Gun.
7.
Check the O ring of the gun and Install the gun to the column.
8.
Click the [Gun] button again, the color of the button will change to grey, V2 and V3 is opened,
system will pump the low vacuum. When TMP is opened, system will pump the high vacuum,
until the color of vacuum turns to GREEN, SEM can begin to work. It is recommended to start
working after vacuum degree is better than 5.0*10
-5
Torr, otherwise the filament life will be
affected.
9.
Alignment of Mechanical Correction
❖
Adjust HV, Contrast and Filament to acquire an image.
❖
Set the Beam alignment X and Y to zero.
❖
Adjust the magnification to 500X, select the Active area and high scanning speed.
❖
Use an inner hexagon spanner to adjust the 3 inner hexagon screws which have been
installed in the top of the Gun cap. When adjusting, observe the lightness of the screen.
Until the image is brightest, the alignment is finished.
❖
Adjust the Beam alignment X and Y to do the fine adjustment.
7.2.
Replacement of Scintillator of SE Detector
Long time bombardment from electron beam will cause surface contamination of scintillator,
which will produce charge accumulation and discharge, this may reduce the luminous efficiency
of scintillator and the signal to noise ratio of image. Generally the scintillator should be changed
once a year. The methods are as follows:
1.
Click the [OFF] button, close the V1, Vent specimen chamber and pull out the specimen stage fully.
Summary of Contents for A63.7069
Page 21: ... 20 Control Panel ...
Page 41: ... 40 4 10 Dither ...
Page 43: ... 42 4 12 4 Pseudo Colors Source Pseudo Colors 4 13 Options ...
