ONTRAK Synergy Integra, Operation Manual

Page: 334 / 350

11-10 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
COLLECTION EVENTS (CEIDS)
The following collection events are sent by the cleaner and can be
received by the GEM system host.
Cleaner collection events must be
enabled by the host to be functional. The following table is also
included in the SECS/GEM Manual (20-0200-055/056) as Appendix B.
The following GWGEM collection events exist at the Equipment.
CEID Name Description
1 Start System put into start mode.
2 Pause Put into pause.
3 NewCassLd New cassette placed on load (input) station.
4 NoCassLd Cassette removed from load (input) station.
5 NewCassUld New cassette placed on unload (output) station.
6 NoCassUld Cassette removed from unload (output) station.
7 ClrModeSet Clear mode set.
8 ClrModeRst Clear mode reset (continuous).
9 SelRecipe New recipe selected.
10 MsgAck Text message acknowledge by operator.
11 InLidOpen Input lid open.
12 InLidClosed Input lid closed.
13 GemPPChangeEvent
14 OutputStart Output cassette start.
20 ProcStart Process start.
21 ProcCompl Process complete.
22 GemEquipmentOFFLINE
25 GemControStateLOCAL
26 GemControlStateREMOTE
50 InputStationReady
Input Station is ready to accept a wafer from the polisher.
51 InputDoorOpen
Input Station door or bulkhead door is open.
52 InputDoorClosed
Input Station door or bulkhead door is closed.
53 InputWaferAccepted
Input Station has accepted a wafer from the polisher.
54 OutputStationReady
Spin Station is ready to deliver a wafer to the polisher (Integra).
55 OutputFingersOpen
Spin fingers are open. (Integra)
56 Brush1Transfer
Brush Station #1 has transfered a wafer to Brush Station #2.
57 Brush2Transfer
Brush Station #2 has transfered a wafer to Spin Station.
58 WaferRecovery
System is about to perform Wafer Recovery.
59 InputPodArrived
A Pod has been placed on the Input station SMIF.
60 InputPodRemoved
Pod has been removed from the Input Station SMIF.
61 InputReadyToLoad
Input Station is ready to load from the SMIF.
62 InputReadyToUnload
Input Station is ready to unload to the SMIF.