ONTRAK Synergy Integra, Operation Manual, Page: 263 / 350

C h a p t e r 1 0 A L A R M S
7/26/00 INTEGRA Operations Revision A 10-25
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
A
LARM
ID: 33
Description: Brush #2 Error Looking For Spin Carriage Extend
Sensor
Posting Program: Brush 2 Station
Alarm Type: Alarm & Sonalert
Reason: If the Spin Carriage is not in the extend position when it
is time to release the wafer into the Spin Station, an attempt is
made by the Brush 2 Station program to extend it. The alarm
indicates the attempt failed.
Disposition: The Brush 2 Station program will not continue until
the spin carriage extend sensor detects the Spin Carriage in the
extend position.
GEM ALID: 33
GEM Alarm.
A
LARM
ID: 34
Description: Brush Station #2 Error Looking For Spindle Mid
Sensor
Posting Program: Brush 2 Station
Alarm Type: Alarm & Sonalert
Reason: If the spindle is not in the MID position when it is time
to release the wafer into the Spin Station, an attempt is made by
the Brush 2 Station program to put it at MID position. The alarm
indicates the attempt failed.
Disposition: The Brush 2 Station program will not continue until
the spindle mid sensor detects the spindle in the MID position.
GEM ALID: 34
GEM Alarm.
A
LARM
ID: 35
Description: Brush Station #2 Error Looking For Z_Lock Locked
Sensor
Posting Program: Brush 2 Station
Alarm Type: Alarm & Sonalert
Reason: Any time a spindle movement is attempted by the Brush
2 Station program, the Z_Lock must be re-locked afterwards. The
alarm indicates a failed attempt to lock the Z_Lock mechanism.
ALCD ALTX ON CEID OFF CEID
6 33 Brush #2 error looking for Spin Carriage
Extend Sensor 267 268
ALCD ALTX ON CEID OFF CEID
6 34 Brush #2 error looking for Spindle Mid Sensor. 269 270