ONTRAK Synergy Integra, Operation Manual

Page: 243 / 350

C h a p t e r 1 0 A L A R M S
7/26/00 INTEGRA Operations Revision A 10-5
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
GEM A
LARMS
(E
RROR
M
ESSAGES
)
GEM alarms display in the
CURRENT ALARM
box on the Integra
cleaner’s
SYSTEM STATUS
screen. GEM alarms can also be reviewed
in the Alarm logs of both the CMP host system and Integra cleaner.
Note
Although the Integra cleaner has a
GEM CONFIGURATION
screen
(see Chapter 11, GEM Configuration & Messages), no alarms are
posted to this screen. The
GEM CONFIGURATION
screen is primarily
used for the initial loading and configuring of the GEM interface
during final system test at the factory.
STANDARD
37 SPIN STATION WAITING ON WAFER FROM
200mm