C h a p t e r 1 0 A L A R M S
7/26/00
INTEGRA Operations Revision A
10-3
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
ALARMS ON THE SCREEN
It is the operator’s responsibility to immediately record and resolve
each alarm that displays on the screen before touching the light bulb
to erase it. In this way, alarms are dealt with and not forgotten.
The following illustration shows the location of the light bulb icon
and alarm message field.
To view recent alarms on the
ALARM MESSAGE
screen, touch the
EXIT
button (lower right side), on the
SYSTEM STATUS
screen.
STANDARD
37 SPIN STATION WAITING ON WAFER FROM
Summary of Contents for Synergy Integra
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