C h a p t e r 9 P R O C E S S R E C I P E
7/26/00
INTEGRA Operations Revision A
9-57
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
8 Enter the speed in
RPM
on the
NUMBER PAD,
and touch ENTER.
The SPINDLE SPEED setting regulates the revolutions per
minute (
RPM
) at which the spindle turns the wafer in the Spin
Station during this EVENT. The first EVENTS may have a slower
speed as the larger droplets of water are spun off. Later EVENTS
may have higher speeds to help the wafer dry faster.
B
CAUTION:
DO NOT
set the spindle speed higher than
1800
RPM
.
Change MEGASONIC SWEEP
The MEGASONIC SWEEPS
and the SECONDS/SWEEP settings are
only applicable to the megasonic process.
STANDARD
STANDARD
Summary of Contents for Synergy Integra
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