C h a p t e r 9 P R O C E S S R E C I P E
7/26/00
INTEGRA Operations Revision A
9-55
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
The HEAT LAMP button is a toggle switch which turns ON/ OFF the
heat lamp during the entire time that the spin EVENT is operating.
The heat lamp is used to aid the drying procedure during the spin
cycle. It is a 1000 watt lamp which comes on during the EVENTS in
which its switch is activated. The heat lamp is not usually used in
the early EVENTS when larger drops of water are being removed.
It is normally used in later EVENTS to help dry the wafer.
MEGASONIC GENERATOR BUTTONS
Change MEGASONICS GEN. (Option)
5 Touch MEGASONIC GEN to activate (ON) or deactivate (OFF)
the megasonic generator. The current status displays on the right
side of the button.
A
NOTE:
The Upper Rinse and Heat Lamp are never used during a Megasonic event.
The MEGASONIC GEN is a toggle switch which turns ON/OFF
the Megasonic Generator. If the status does
not
display ON, then
the megasonic generator will not work even though its time
settings are configured.
STANDARD
Summary of Contents for Synergy Integra
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