ONTRAK Synergy Integra, Operation Manual

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C h a p t e r 9 P R O C E S S R E C I P E
7/26/00 INTEGRA Operations Revision A 9-53
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Each of the three screens have three EVENTS. The EVENTS are
numbered at the top of each screen (e.g., EVENT 1, EVENT 2, and
EVENT 3).
Choose Spin Station EVENT
Each of the nine EVENTS contain the same set of variables for the
Spin Station operation. The screen provides access for setting the
parameters of each variable in each EVENT. Each setting is valid
only for the amount of time a particular EVENT is in process. When
the time in each EVENT expires, the system moves to the settings in
the next EVENT, proceeding through all nine spin EVENTS.
Change UPPER RINSE
2 Touch UPPER RINSE to activate (ON) or deactivate (OFF) the top
spray rinse. The current status displays on the right side of the button.
The UPPER RINSE button is an ON/OFF toggle switch for the DI
water spray applied to the top of the wafer during the spin EVENT.
STANDARD