ONTRAK Synergy Integra, Operation Manual

Page: 211 / 350

C h a p t e r 9 P R O C E S S R E C I P E
7/26/00 INTEGRA Operations Revision A 9-51
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
MODIFY SPIN EVENTS
If the
PROCESS PROGRAM MANAGEMENT SCREEN
is displayed, touch
CHANGE PROCESS to display the
MODIFY STATION RECIPE
screen.
If the
MODIFY STATION RECIPE
screen is displayed, touch the first
MODIFY SPIN EVENTS button.
Nine individual EVENTS control the wafer drying process in the Spin
Station. Use the MODIFY SPIN EVENT 1-3, MODIFY SPIN EVENT 4-6,
and MODIFY SPIN EVENT 7-9 buttons to display the corresponding
SPIN STATION PROCESS EDIT SCREEN
to set EVENT variables
(following illustration). Together these EVENTS allow precise timing of
the critical activities in the complete drying process. Each variable in an
EVENT operates for the length of time specified by the value to the right
of the TIME button.
Use the following table when setting Spin Station parameters.
STANDARD
Parameter Range Units
Spin Station (Events 1-9)
Upper Rinse On/Off Binary (0 or 1)
Lower Rinse On/Off Binary (0 or 1)
Heat Lamp On/Off Binary (0 or 1)
Megasonic Generator On/Off Binary (0 or 1)