9-50
INTEGRA Operations Revision A
7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Change DOSE HI FLOW DI
49 Toggle the DOSE HI FLOW DI ON or OFF (default: OFF) for
Brush Station #1 or Brush Station #2.
When DOSE HI FLOW DI is set to ON, high flow DI water is
used to dose the brushes. Brush dosing continues for the time set
in the WAFER DOSE TIME.
DOSE HI FLOW DI is not typically enabled (ON) because the 1
st
WAFER dosing option is used to precondition the brushes and
establish the proper processing pH. If DOSE HI FLOW DI is
enabled (ON), the process chemical pH may be diluted.
When DOSE MODE is selected, and/or the DOSE LOW FLOW
DI, and/or the DOSE HI FLOW DI are set to ON, then they will
all start when the dosing chemical starts.
STANDARD
Summary of Contents for Synergy Integra
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