ONTRAK Synergy Integra, Operation Manual, Page: 176 / 350

9-16 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Change DI LOW FLOW MODE
14 Touch DI LOW FLOW MODE to toggle ON or OFF DI water after
the last EVENT in Brush Station #1.
If DI Low Flow Mode is ON, the low flow of DI will be turned on
and remain on after the last processing EVENT in Brush Station
#1 has ended.
If DI Low Flow Mode is OFF, the low flow of DI will be turned off
and remains off at the end of the last processing EVENT in Brush
Station #1. DI will remain off until the next wafer is processed
using DI water.
The current status displays on the right side of the button.
A
NOTE:
If DI Low Flow
2-way air controlled fluid valves
are installed, and the selected
Process Recipe has DI LOW FLOW MODE toggled OFF, then the system will not flow
DI water or chemical to the brushes while not processing wafers or in STOP mode.
Brushes must be kept rolling to prevent the tops of the brushes from drying out. Do not
leave the system in the STOP mode for more than an hour. The brushes will dry out! If the
system is to be down for more than an hour, see “Several Hours” on page 5-14 .
STANDARD