ONTRAK Synergy Integra, Operation Manual, Page: 175 / 350

C h a p t e r 9 P R O C E S S R E C I P E
7/26/00 INTEGRA Operations Revision A 9-15
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
Change ENTRANCE And EXIT SPRAY
13 Touch ENTRANCE SPRAY and/or EXIT SPRAY to toggle ON or
OFF the DI water spray rinse located at the entrance and exit of
Brush Station #1. The current status displays on the right side of
the button.
ALARM BRUSH MODE :
UP/DOWN brush toggle
switch.
PROCESS ALARM TIMEOUT,
FLUSH DURATION, and ALARM
BRUSH MODE work together.
ALARM BRUSH MODE controls
the position of the brushes (UP or
DOWN) once Alarm #158 signals.
If DOWN (default), the brushes
remain on the wafer and the
brushes and rollers continue to
turn.
If UP is selected, the brushes will
move off the wafer and the brushes
and rollers stop turning.
Current status is displayed on
the right side of the button.
BRUSH IDLE SPEED :
Defining button which
brings up NUMBER PAD.
Speed at which the brushes turn
when the machine is idle. The
speed is measured in revolutions
per minute ( RPM .) (Parameter
range: 0 - 140 for standard motor.)
Keep the brushes rolling with
DI water or chemical flowing
through them to prevent the
brushes from drying out. When
prediluted chemical is used and
the system is in STOP mode,
the rollers will stop turning and
the system will not flow DI
water to the brushes. DO NOT
leave the system in this
condition for more than an hour.
BRUSH HEIGHT :
Defining button which
brings up NUMBER PAD.
Sets the distance between the
upper and lower brushes.
(Parameter range:
1 - 5.
)
Settings are designed to vary
the brush contact pressure on
the wafers.
BUTTON NAME & TYPE DESCRIPTION COMMENTS