ONTRAK Synergy Integra, Operation Manual, Page: 154 / 350

7-14 INTEGRA Operations Revision A 7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
BRUSH MOTOR ALARMS
Use the BRUSH MOTOR ALARMS button to enable the reporting of
Brush Station brush motor failure alarms. The BRUSH MOTOR
ALARMS button is a toggle switch which changes between Enabled
and Disabled. When the feature is Enabled and a brush motor alarm
(failure) is posted, a light bulb icon displays in the Warning section of
the
SYSTEM STATUS
screen and an audible alarm sounds. Also, a
written description of the alarm displays in the
CURRENT WARNING
box of the
SYSTEM STATUS
screen. (See "Alarm Types" page 10-2.)
The system will continue processing wafers already in stations
following the Brush Station with the motor failure.
Use the following procedure to set the BRUSH MOTOR ALARMS status.
1 From the
MAIN MENU
screen, touch SELECT OPTIONS.
2 When the
SYSTEM OPTIONS
screen displays, touch BRUSH
MOTOR ALARMS to toggle between
Enabled
and
Disabled
. The
current status displays on the right side of the button.
3 Touch EXIT to return to the
MAIN MENU
screen.